The unusual tribological behavior of diamond-like carbon films under high vacuum
The unusual tribological behavior of diamond-like carbon films under high vacuum
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高真空下类金刚石碳膜的异常摩擦学行为
DOI：
10.1002/sia.6740
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发表时间：
--
影响因子：
1.7
通讯作者：
Zhongyi He
中科院分区：
文献类型：
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作者：
Renhui Zhang;Mengxue Shen;Zhongyi He
利用等离子体增强化学气相沉积系统制备了F掺杂和F-S共掺类金刚石薄膜。硬度、拉曼光谱和高真空摩擦学性能表明薄膜为类金刚石薄膜。在高真空条件下，DLC膜的硬度与其摩擦学性能密切相关。DLC膜具有较高的硬度，有利于在高真空条件下获得长寿命。F-S共掺类金刚石薄膜的寿命约为120秒和140秒，这归功于高真空下的快速石墨化。掺F类金刚石薄膜的寿命延长到300秒和440秒左右，X射线光电子能谱分析表明存在“吸附”F，透射电子显微镜分析表明“吸附”F可以在初始滑移时与Fe反应生成层状FeF2纳米晶，这有助于延长高真空下掺F类金刚石薄膜的寿命。这项研究为克服高真空下掺F，S类金刚石薄膜的缺点开辟了一扇新的窗口。
We fabricate F‐doped and F‐S‐codoped diamond‐like carbon (DLC) films using plasma‐enhanced chemical vapor deposition system. The hardness, Raman spectra, and high‐vacuum tribological behaviors indicate that the films are DLC films. The hardness is close related to the tribological properties of DLC films under high vacuum. The high hardness of DLC films would be helpful for obtaining the long lifetime under high vacuum. The lifetimes of F‐S‐codoped DLC films are about 120 and 140 seconds, which is attributed to the fast graphitization under high vacuum. The lifetime of F‐doped DLC films is prolonged to the value of around 300 and 440 seconds, X‐ray photoelectron spectroscopy analysis exhibits the existence of the “adsorption” F, and transmission electron microscopy analysis shows that the “adsorption” F could react with Fe to form layered FeF2nanocrystal at the initial sliding, which could be helpful for prolonging the lifetime of F‐doped DLC films under high vacuum. This investigation opens a new window to overcome the disadvantage of F, S‐doped DLC films under high vacuum.