The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations
The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations
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多极共振探头：使用 3D 电磁场模拟研究有源等离子共振探头
DOI：
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发表时间：
2012
期刊：
影响因子：
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通讯作者：
T. Musch
中科院分区：
文献类型：
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作者：
C. Schulz;I. Rolfes;T. Styrnoll;P. Awakowicz;M. Lapke;J. Oberrath;T. Mussenbrock;R. Brinkmann;R. Storch;T. Musch
A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe.
