Behaviour of electrical and optical properties of indium tin oxide transparent electrode after CMP process
Behaviour of electrical and optical properties of indium tin oxide transparent electrode after CMP process
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DOI：
10.1049/el:20060156
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发表时间：
2006-04
影响因子：
1.1
通讯作者：
G. Choi;N. Kim;Y. Seo;W. Lee
中科院分区：
文献类型：
--
作者：
G. Choi;N. Kim;Y. Seo;W. Lee
Indium tin oxide (ITO) thin film was prepared by a chemical mechanical polishing (CMP) process for good surface morphology. The optical transmittance of ITO thin film was improved after the CMP process as a result of the optimised process parameters compared to that of as-deposited thin film before the CMP process.
