Measuring the performance of scanning electron microscope detectors
Measuring the performance of scanning electron microscope detectors
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DOI：
10.1002/sca.4950180802
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发表时间：
1996-11-01
期刊：
影响因子：
--
通讯作者：
Bunn, RD
中科院分区：
文献类型：
--
作者：
Joy, DC;Joy, CS;Bunn, RD
介绍了一种简单的测量扫描电子显微镜（SEM）中探测器性能的数字方法。所得值是绝对的，因此可用于比较同一仪器上的不同探测器以及不同仪器上的不同探测器。该技术可应用于二次电子、背散射电子和能量色散x射线探测器。给出了在安装在许多当前sem上的各种商业探测器上进行测量的例子。
A simple digital method of measuring the performance of detectors in the scanning electron microscope (SEM) is described. The value derived is absolute and can therefore be used to compare both different detectors on the same instrument as well as different detectors on different instruments. The technique can be applied to secondary electron, backscattered electron, and energy-dispersive x-ray detectors. Examples are given of measurements made on a variety of commercial detectors installed on a number of current SEMs.