X-ray reflection by rough multilayer gratings: Dynamical and kinematical scattering

X-ray reflection by rough multilayer gratings: Dynamical and kinematical scattering
复制标题

粗糙多层光栅的 X 射线反射：动态和运动学散射

DOI：
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发表时间：
1999
期刊：
影响因子：
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通讯作者：
T. Baumbach
T. Baumbach
中科院分区：
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文献类型：
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作者：
P. Mikulík;T. Baumbach

文献摘要

被引文献

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讨论了粗糙多层膜光栅的X射线反射率， 运动学和动力学理论的框架。的 运动学散射积分计算没有 Fraunhofer近似的限制。动态 理论的矩阵模态特征值法。在 这两种理论都概括了菲涅耳反射， 光栅衍射情况下的透射系数。 我们得到了一个独特的形式主义，使我们能够比较 这是两种理论的直接结果。此外，接口 并且考虑侧壁粗糙度。动态 方法允许解释实验结果获得 从部分蚀刻的GaAs/InP周期性多层光栅。
X-ray reflectivity by rough multilayer gratings is treated in the framework of the kinematical and dynamical theories. The kinematical scattering integral is calculated without the restrictions of the Fraunhofer approximation. The dynamical theory is presented by the matrix modal eigenvalue approach. In both theories we generalize the Fresnel reflection and transmission coefficients for the case of grating diffraction. We obtained one unique formalism which permits us to compare directly the results of both theories. Furthermore, interface and side wall roughnesses are taken into account. The dynamical approach allowed to explain the experimental results obtained from a partially etched GaAs/InP periodic multilayer grating.