Design, implementation, and application of a microresonator platform for measuring energy dissipation by internal friction in nanowires
Design, implementation, and application of a microresonator platform for measuring energy dissipation by internal friction in nanowires
复制标题
用于测量纳米线内摩擦能量耗散的微谐振器平台的设计、实现和应用
DOI：
10.1088/0957-4484/23/50/505703
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发表时间：
2012
期刊：
影响因子：
3.5
通讯作者：
S. Vengallatore
中科院分区：
文献类型：
--
作者：
K. Das;G. Sosale;S. Vengallatore
为了合理设计纳米机电系统中使用的高 Q 谐振器以及纳米机械行为的基础研究，需要精确测量纳米线的内摩擦。然而，测量内摩擦具有挑战性，因为确定材料耗散对结构阻尼的贡献存在困难。在这里，我们提出了一种通过使用复合微谐振器平台来克服这些困难的方法，该平台根据热弹性阻尼的极限进行校准。该平台由在低损耗单晶硅微悬臂梁根部形成图案的纳米线阵列组成。该结构采用电子束光刻技术实施的剥离技术进行加工，以实现对纳米线阵列的尺寸、对准、分散和位置的出色控制。作为该平台的首次应用，我们测量了厚度为 50 至 100 nm、宽度为 100 至 400 nm 的铝纳米线在室温下的内摩擦。频率为 6.5–21 kHz 时，内摩擦为 ∼0.03。纳米晶粒结构的透射电子显微镜，以及与先前测量的连续铝薄膜中的内耗值的比较，表明晶界滑动是这些纳米线中内耗的主要来源。
Accurate measurements of internal friction in nanowires are required for the rational design of high-Q resonators used in nanoelectromechanical systems and for fundamental studies of nanomechanical behavior. However, measuring internal friction is challenging because of the difficulties associated with identifying the contributions of material dissipation to structural damping. Here, we present an approach for overcoming these difficulties by using a composite microresonator platform that is calibrated against the ultimate limits of thermoelastic damping. The platform consists of an array of nanowires patterned at the root of a low-loss single-crystal silicon microcantilever. The structure is processed using a lift-off technique, implemented using electron-beam lithography, to achieve excellent control over the size, alignment, dispersion and location of the nanowire array. As the first application of this platform, we measured internal friction at room temperature in aluminum nanowires that ranged from 50 to 100 nm in thickness and 100 to 400 nm in width. Internal friction is ∼0.03 at frequencies of 6.5–21 kHz. Transmission electron microscopy of the nanocrystalline grain structure, and comparison with previously measured values of internal friction in continuous thin films of aluminum, suggest that grain-boundary sliding is a major source of internal friction in these nanowires.
影响因子：
10.8
作者：
Yang YT;Callegari C;Feng XL;Roukes ML
通讯作者：
Roukes ML