Structure and properties of lanthanum doped AlCrN coatings
Structure and properties of lanthanum doped AlCrN coatings
复制标题
DOI：
10.1016/j.surfcoat.2018.01.060
复制
发表时间：
2018-03-15
影响因子：
5.4
通讯作者：
Wan, Weicai
中科院分区：
文献类型：
--
作者：
Du, Hao;Wang, Linlin;Wan, Weicai
AlCr(La)N 涂层是通过中频反应磁控溅射在硬质合金 (YG8) 和单晶硅 (111) 晶片上生长的。对不同La靶电流下沉积的涂层的成分、微观结构和力学性能进行了评价。 La 的浓度从 0 变化为 。 % 至 7.73 at.%，与 Al 和 Cr 相比，显示出较低的背向散射率。 La部分作为AlCrN晶格中的部分固溶体，而增加量的La很可能在晶间聚集，导致晶界偏析和晶粒尺寸减小。在此现象期间，形成了与a-La2O3/a-LaN结合的nc-AlCrLaN晶粒。随着 La 靶电流的增加，出现了多层形貌。由于La2O3的固体润滑作用，AlCrLaN涂层的摩擦系数降低。 AlCrLaN涂层在La靶电流1 A（La浓度1.39 at.%）下获得了最高的H/E比、H-3/E*(2)比、耐磨性和附着强度。
AlCr(La)N coatings were grown through mid-frequency reactive magnetron sputtering on cemented carbide (YG8) and single-crystal silicon (111) wafer. The composition, microstructure and mechanical properties of the coatings deposited under different La target currents were evaluated. The concentration of La changed from 0 at. % to 7.73 at.% displaying a low rate of back-scattering compared to Al and Cr. La partly acted as a partial solid solution in the AlCrN lattice, whereas an increased amount of La was likely to be intergranular gathered, resulting in segregation at the grain boundaries and a grain size decrease. During this phenomenon, nc-AlCrLaN crystalline grains combined with a-La2O3/a-LaN were formed. The multilayer morphology appeared as the La target current increased. The friction coefficient of the AlCrLaN coating decreased due to the solid lubrication of La2O3. The AlCrLaN coating under the La target current of 1 A (La concentration 1.39 at.%) obtained the highest H/E ratio, H-3/E*(2) ratio, abrasive resistance and adhesion strength.