Optical-fiber frequency domain interferometer with nanometer resolution and centimeter measuring range.
Optical-fiber frequency domain interferometer with nanometer resolution and centimeter measuring range.
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DOI：
10.1063/1.4829615
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发表时间：
2013-11
期刊：
影响因子：
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通讯作者：
Jidong Weng;Tianjiong Tao;Shenggang Liu;Heli Ma;Xiang Wang;Cangli Liu;Hua Tan
中科院分区：
文献类型：
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作者：
Jidong Weng;Tianjiong Tao;Shenggang Liu;Heli Ma;Xiang Wang;Cangli Liu;Hua Tan
研制了一种新型的光纤频域干涉仪（OFDI）装置，用于精确测量两个静止物体之间的绝对距离，具有厘米级的测量范围和纳米级的分辨率。阐述了其工作原理和在线数据处理方法。新的对外直接投资工具全部采用现有的商业通信产品。采用宽光谱放大自发辐射光作为光源，光纤针尖作为测试探头。由于该装置仅由光纤或光纤耦合部件组成，因此非常紧凑，操作方便，易于携带。通过测量平移台的单步长度和标准量块的厚度，验证了该系统实现纳米级分辨率和厘米级量程在线测量的能力。
A new optical-fiber frequency domain interferometer (OFDI) device for accurate measurement of the absolute distance between two stationary objects, with centimeter measuring range and nanometer resolution, has been developed. Its working principle and on-line data processing method were elaborated. The new OFDI instrument was constructed all with currently available commercial communication products. It adopted the wide-spectrum amplified spontaneous emission light as the light source and optical-fiber tip as the test probe. Since this device consists of only fibers or fiber coupled components, it is very compact, convenient to operate, and easy to carry. By measuring the single-step length of a translation stage and the thickness of standard gauge blocks, its ability in implementing nanometer resolution and centimeter measuring range on-line measurements was validated.