Auto DB construction from Web syllabus

Auto DB construction from Web syllabus
复制标题

根据Web课程大纲自动构建数据库

DOI：
10.1109/transducers.2019.8808313
复制
发表时间：
2003
期刊：
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
影响因子：
--
通讯作者：
S. Hirokawa
S. Hirokawa
中科院分区：
--
文献类型：
--
作者：
伊東 栄典;E. Ito;松永 吉広;Y. Matsunaga;山田 信太郎;Shintaro Yamada;廣川 佐千男;S. Hirokawa

文献摘要

被引文献

相似文献

设计、制作并评价了基于静电驱动钨涂层硅纳米机电（NEM）开关的NAND和NOR逻辑门。研究了在高深宽比硅结构上选择性共形沉积钨的方法。成功地制作了逻辑门，并证明了它们的全部功能。这项工作不仅为制造复杂的机械逻辑系统，而且为减小电容间隙宽度开辟了可能性。
NAND and NOR logical gates based on the electrostatically driven silicon nanoelectromechanical (NEM) switches coated tungsten (W) are designed, fabricated and evaluated. A selectively conformal W deposition on high aspect ratio silicon structures is investigated. Logical gates are successfully fabricated and all their functions have been proved. This work opens the possibility not only for producing the complex mechanical logic systems but also for a way to reducing capacitive gap width.