High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing
High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing
复制标题
高精度检测非晶氧化锆掺杂钽薄膜因退火引起的中程序变化
DOI：
10.1103/physrevlett.123.045501
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发表时间：
2019
影响因子：
8.6
通讯作者：
Harry, G.
中科院分区：
文献类型：
--
作者：
Prasai, K.;Jiang, J.;Mishkin, A.;Shyam, B.;Angelova, S.;Birney, R.;Drabold, D. A.;Fazio, M.;Gustafson, E. K.;Harry, G.
了解非晶薄膜涂层中的局部原子顺序及其与宏观性能因素（如机械损耗）的关系，为加速发现和开发改进涂层提供了重要途径。对非晶态氧化锆掺杂钽薄膜的高精度x射线散射测量表明，中间阶数（IRO）作为沉积后热处理（退火）的函数发生了系统的变化。原子建模捕获并解释了这些变化，并表明材料具有金属中心多面体的构建块，退火的效果是改变多面体之间的连接。观察到的IRO变化与角共享多面体与边共享多面体比例的变化有关。这些变化与退火后机械损失的变化有关，表明机械损失可以通过开发具有设计的共享角和共享边多面体比例的材料来降低。
Understanding the local atomic order in amorphous thin film coatings and how it relates to macroscopic performance factors, such as mechanical loss, provides an important path towards enabling the accelerated discovery and development of improved coatings. High precision x-ray scattering measurements of thin films of amorphous zirconia-doped tantala () show systematic changes in intermediate range order (IRO) as a function of postdeposition heat treatment (annealing). Atomic modeling captures and explains these changes, and shows that the material has building blocks of metal-centered polyhedra and the effect of annealing is to alter the connections between the polyhedra. The observed changes in IRO are associated with a shift in the ratio of corner-sharing to edge-sharing polyhedra. These changes correlate with changes in mechanical loss upon annealing, and suggest that the mechanical loss can be reduced by developing a material with a designed ratio of corner-sharing to edge-sharing polyhedra.