Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor
Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor
复制标题
双功能超材料可实现超紧凑、高灵敏度非制冷红外传感器
DOI：
10.1515/nanoph-2020-0607
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发表时间：
2021-01
期刊：
影响因子：
7.5
通讯作者：
Tarik Bourouina
中科院分区：
文献类型：
--
作者：
Jin Tao;Zhongzhu Liang;Guang Zeng;Dejia Meng;David R. Smith;Qing Huo Liu;Qingrui Yang;Menglun Zhang;Wei Pang;Jingqiu Liang;Tarik Bourouina
Abstract Cointegration and coupling a perfect metamaterial absorber (PMA) together with a film bulk acoustic wave resonator (FBAR) in a monolithic fashion is introduced for the purpose of producing ultracompact uncooled infrared sensors of high sensitivity. An optimized ultrathin multilayer stack was implemented to realize the proposed device. It is experimentally demonstrated that the resonance frequency of the FBAR can be used efficiently as a sensor output as it downshifts linearly with the intensity of the incident infrared irradiation. The resulting sensor also achieves a high absorption of 88% for an infrared spectrum centered at a wavelength of 8.2 μm. The structure is compact and can be easily integrated on a CMOS-compatible chip since both the FBAR and PMA utilize and share the same stack of metal and dielectric layers.
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