Highly sensitive polymer-based cantilever-sensors for DNA detection
Highly sensitive polymer-based cantilever-sensors for DNA detection
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DOI：
10.1016/j.ultramic.2005.06.039
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发表时间：
2005-11-01
期刊：
影响因子：
2.2
通讯作者：
Boisen, A
中科院分区：
文献类型：
--
作者：
Calleja, M;Nordström, M;Boisen, A
我们提出了一种技术，旨在开发一个集成的生物传感器微系统的悬臂梁阵列的制造。制造过程基于光敏聚合物的旋涂和近紫外曝光。在新型聚合物材料SU-8中制造了多达33个微悬臂梁的阵列。聚合物的低杨氏模量（比硅的杨氏模量低40倍）使得能够提高传感器装置用于目标检测的灵敏度。研究了SU-8型悬臂梁的弹簧常数、谐振频率和品质因数等力学性能随尺寸和介质的变化规律。已经测试了该装置用于测量单链DNA的吸附和随后的横向间隔分子的间隙吸附。我们证明，灵敏度提高了6倍相比，商业氮化硅晶体管。(c)2005 Elsevier B. V.保留所有权利。
We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers. (c) 2005 Elsevier B.V. All rights reserved.