Preparation of High-Tc Superconducting Films by Q-Switched YAG Laser Sputtering
Preparation of High-Tc Superconducting Films by Q-Switched YAG Laser Sputtering
复制标题
调Q YAG激光溅射制备高温超导薄膜
DOI：
10.1143/jjap.27.l34
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发表时间：
1988
期刊：
影响因子：
--
通讯作者：
S. Namba
中科院分区：
文献类型：
--
作者：
S. Komuro;Y. Aoyagi;T. Morikawa;S. Namba
利用调Q YAG激光器发出的可见光进行的激光溅射技术被证明是用于制备高Tc Y-Ba-Cu-O超导薄膜的。得到的薄膜揭示98 K的起始Tc和90 K的偏移Tc，这是非常相似的散装靶材料。溅射膜中Ba/Y和Cu/Y的组成比被发现是在所使用的激光功率范围内与体靶材料中的那些完全一致。溅射过程的团簇模型很好地解释了这些结果。
A laser sputtering technique using visible light from a Q-switched YAG laser is proven to be of use for high-Tc Y-Ba-Cu-O superconducting film fabrication. The obtained films reveal onset Tc of 98 K and offset Tc of 90 K, which are very similar to the bulk target material. The compositional ratios of Ba/Y and Cu/Y in as-sputtered films are found to be in perfect agreement with those in the bulk target material for a used laser power range. These results are well explained by a cluster model for the sputtering process.