High-performance arduino-based interferometric quadrature phase-shift detection system with 1 nm resolution

High-performance arduino-based interferometric quadrature phase-shift detection system with 1 nm resolution
复制标题

基于 arduino 的高性能干涉正交相移检测系统,分辨率为 1 nm

DOI:
10.1063/5.0055484
复制
发表时间:
2021
期刊:
影响因子:
1.6
通讯作者:
M. Fokine
M. Fokine
中科院分区:
材料科学4区
文献类型:
--
作者:
K. Mühlberger;C. Harvey;M. Fokine

文献摘要

参考文献

被引文献

相似文献

正交相移检测系统的干涉测量已被概念化和评估。主要部件,一个微控制器和两个光电探测器,使一个通用的低成本检测系统的位移测量或更一般的相变测量。该系统能够以5 kHz采样,空间分辨率为1 nm。
A quadrature phase-shift detection system for interferometry has been conceptualized and evaluated. The main components, a microcontroller and two photodetectors, make a versatile low-cost detection system for displacement measurements or more generally phase-change measurements. The system is capable of sampling at 5 kHz with a spatial resolution of 1 nm.
DOI: 10.3109/08820539809056053
发表时间: 1998-12-01
影响因子: 1.7
作者:
Ripandelli, G;Coppe, A M;Stirpe, M
通讯作者: Stirpe, M