Influence of surface effects on size-dependent instability of nano-actuators in the presence of quantum vacuum fluctuations
Influence of surface effects on size-dependent instability of nano-actuators in the presence of quantum vacuum fluctuations
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DOI：
10.1088/0031-8949/85/03/035804
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发表时间：
2012-03
期刊：
影响因子：
2.9
通讯作者：
A. Koochi;A. Kazemi;Farzaneh. Khandani;M. Abadyan
中科院分区：
文献类型：
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作者：
A. Koochi;A. Kazemi;Farzaneh. Khandani;M. Abadyan
虽然表面效应往往在机电纳米致动器的吸合性能中起着重要作用，但只有少数工作考虑了这些效应。在本文中，表面效应，包括表面残余应力和表面弹性的悬臂纳米致动器的吸合不稳定性的影响进行了研究纳入量子真空涨落通过Casimir吸引力的影响。利用修正的Adomian分解（MAD）级数，得到了该问题的解析解，并将所得结果与文献中的结果以及数值解进行了比较.确定了执行器的失稳参数。结果表明，表面效应导致悬臂纳米致动器表现为一个较软的结构。据发现，表面效应变得更显着的致动器厚度的低值以及初始间隙/宽度比的高值。此外，表面能的独立驱动器的分离长度和最小间隙的影响进行了讨论。有趣的是，本MAD解决方案提供了可靠的结果，而没有以前提出的同伦扰动方法的缺点。
While surface effects often play an important role in the pull-in performance of electromechanical nano-actuators, only a few works have been conducted that take these effects into account. In this paper, the influence of surface effects including residual surface stress and surface elasticity on the pull-in instability of a cantilever nano-actuator is investigated incorporating the influence of quantum vacuum fluctuations through the Casimir attraction. An analytical closed-form solution is obtained in terms of the modified Adomian decomposition (MAD) series and the obtained results are compared with those in the literature as well as the numerical solution. The instability parameters of the actuator are determined. The results demonstrate that surface effects cause the cantilever nano-actuator to behave as a softer structure. It is found that surface effects become more significant for low values of the actuator thickness as well as high values of the initial gap/width ratio. Furthermore, the influence of surface energy on the detachment length and the minimum gap of the freestanding actuator is discussed. Interestingly, the present MAD solution provides reliable results without the shortcomings of the previously proposed homotopy perturbation method.