Near-Infrared Absorption Enhancement Mechanism Investigations of Deep-Trench Silicon Microstructures Covered with Gold Films

Near-Infrared Absorption Enhancement Mechanism Investigations of Deep-Trench Silicon Microstructures Covered with Gold Films
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金膜覆盖的深沟槽硅微结构的近红外吸收增强机制研究

DOI:
10.1007/s11468-015-0137-6
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发表时间:
2016-08
期刊:
影响因子:
3
通讯作者:
Shen Zhenfeng
Shen Zhenfeng
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Liu Xiaoyi;Gao Jinsong;Yang Haigui;Liu Hai;Wang Xiaoyi;Shen Zhenfeng

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We design a deep-trench microstructure covered with thin gold films to enhance near-infrared absorption of silicon material. This deep-trench microstructure exhibits a much higher absorption compared with plane nanoantenna arrays. We investigate its absorption enhancement in detail and find that the trench-shaped plasmonic waveguide greatly contributes an absorption enhancement by concentrating light effectively. Further, we clarify the influence of both trench depth and gold films covering on different positions of deep trench on the absorption. Finally, we use surface plasmon polaritons offered by plasmonic waveguide to explain well the significant enhancement of near-infrared absorption.
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