Energy dispersive electron probe microanalysis (ED-EPMA) of elemental composition and thickness of Fe-Ni alloy films
Energy dispersive electron probe microanalysis (ED-EPMA) of elemental composition and thickness of Fe-Ni alloy films
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DOI：
10.1002/sia.4975
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发表时间：
2012-11-01
影响因子：
1.7
通讯作者：
Unger, Wolfgang E. S.
中科院分区：
文献类型：
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作者：
Hodoroaba, Vasile-Dan;Kim, Kyung Joong;Unger, Wolfgang E. S.
利用Stratem软件，用电子探针和能谱仪对沉积在硅衬底上的Fe-Ni合金薄膜进行了元素分析。这项工作是在CCQM/SAWG(物质数量/表面分析工作组协商委员会)框架内组织的大量实验室间比较的一部分。因此，对测量不确定度的评定进行了详细的论述。通过质量覆盖和估计层密度，可以得到层厚度。版权所有(C)2012 John Wiley&Sons，Ltd.
The elemental composition of thin Fe-Ni alloy films deposited on silicon substrates were determined by electron probe microanalysis with an energy dispersive spectrometer using the STRATAGem software. The work was part of ample inter-laboratory comparisons organized in the frame of CCQM/SAWG (Consultative Committee for Amount of Substance/Surface Analysis Working Group). Therefore, the evaluation of the measurement uncertainties is treated in detail. By having the mass coverage and estimating a layer density, the layer thickness could be derived. Copyright (C) 2012 John Wiley & Sons, Ltd.