Miniaturized Multilayer Inductors on GaAs Three-dimensional MMIC
Miniaturized Multilayer Inductors on GaAs Three-dimensional MMIC
复制标题
GaAs 三维 MMIC 上的小型化多层电感器
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
K. Uehara
中科院分区：
文献类型：
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作者：
T. Kaho;M. Sasaki;Y. Yamaguchi;K. Nishikawa;K. Uehara
介绍了新型的GaAs三维mmic多层电感。我们测试了单层、双层、三层和四层堆叠型电感器，这可能是关于三层或多层GaAs MMIC上电感器的第一份报告。这些多层电感可以产生更高的电感在相同的面积，作为传统的2d - mmic。在薄片上对单层和多层电感的性能进行了测量，并用有限元法进行电磁场分析计算。多层电感虽然尺寸相同，但产生的电感比单层电感高2~11倍。此外，与单层电感器相比，多层电感器的电阻、q因子和自谐振频率等性能没有下降。多层电感使电路尺寸从几百兆赫兹缩小到毫米波成为可能。
Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single-and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2~11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.