Micro cantilevers with integrated heaters and piezoelectric detectors for low power SPM data storage application
Micro cantilevers with integrated heaters and piezoelectric detectors for low power SPM data storage application
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具有集成加热器和压电探测器的微悬臂梁，适用于低功耗 SPM 数据存储应用
DOI：
10.1109/memsys.2003.1189679
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
J. Bu
中科院分区：
文献类型：
--
作者：
C.S. Lee;W. Jin;H. Nam;S.M. Cho;Y. Kim;J. Bu
在这项研究中，集成了加热器和压电传感器的硅悬臂梁被研究用于低功率扫描探针显微镜（SPM）数据存储系统的聚合物薄膜上的热力写入和压电读回。在聚甲基丙烯酸甲酯（PMMA）薄膜上记录了直径为100纳米的数据位。灵敏度为0.22 fC/nm。最后，利用带有压电传感器的硅悬臂梁，利用30 nm深度的光栅获取电荷读回信号，成功验证了压电悬臂梁的传感能力。得到了基于薄膜形貌的电荷输出，电荷的正负峰对应于光栅的斜率。
In this research, silicon cantilevers with integrated heaters and piezoelectric sensors have been studied for thermomechanical writing and piezoelectric readback on a polymer film, for low power SPM (Scanning Probe Microscopy) data storage system. Data bits of 100 nm in diameter have been recorded on a Poly Methyl Methacrylate (PMMA) film. The sensitivity of 0.22 fC/nm is obtained. Finally, the silicon cantilever with piezoelectric sensor was used to obtain charge readback signal using the grating with 30 nm depth, and the sensing ability of the piezoelectric cantilever was successfully demonstrated. The charge output based on the topography of the film was obtained, and the positive and negative peak of the charge corresponded to the slope of the grating.