The deposition and wear properties of cathodic arc plasma deposition TiAIN deposits
The deposition and wear properties of cathodic arc plasma deposition TiAIN deposits
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DOI：
10.1016/0254-0584(96)80134-9
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发表时间：
1996-10
影响因子：
4.6
通讯作者：
Kwang-Lung Lin;M. Hwang;Cheng-Dau Wu
中科院分区：
文献类型：
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作者：
Kwang-Lung Lin;M. Hwang;Cheng-Dau Wu
采用阴极电弧等离子体沉积技术在工具钢表面制备了TiAlN涂层。应用田口实验设计，以获得最佳的耐磨涂层。衬底偏压，氮分压和目标组合物被认为是其中最有影响力的变量，支配涂层的耐磨性。在本工作中研究的涂层性能包括表面粗糙度，扫描电子显微镜（SEM）表面显微照片，X射线衍射（XRD）相鉴定，涂层显微结构，涂层成分，磨损表面显微照片和元素分析。涂层的显微组织、显微硬度、钛含量和磨屑滞留量对涂层的耐磨性有显著影响。
TiAIN coatings on tool steel were produced with a cathodic arc plasma deposition system. The Taguchi experimental design was applied to achieve the optimum wear-resistant coating. Substrate bias, nitrogen partial pressure and target composition were found to be among the most influential variables that govern the wear resistance of the coatings. The coating properties investigated in the present work include the surface roughness, scanning electron microscope (SEM) surface micrographs, X-ray diffraction (XRD) phase identification, coating microstructure, coating compositions, wear surface micrographs and elemental analysis. The microstructure, microhardness, coating Ti content and residence of wearing debris were found to significantly affect the wear resistance of the coatings.