Nanometer Positioning Characteristics of Closed Looped Differential Hydro-or Aerostatic Actuator
Nanometer Positioning Characteristics of Closed Looped Differential Hydro-or Aerostatic Actuator
复制标题
闭环差动静压或静压执行器的纳米定位特性
DOI：
10.1016/s0007-8506(07)63406-4
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发表时间：
1983
期刊：
影响因子：
--
通讯作者：
T. Hoshi
中科院分区：
文献类型：
--
作者：
A. Kanai;M. Miyashita;T. Hoshi
运动精度误差校正装置对于开发超精密机床克服传统机床运动精度的限制非常重要。与传统机构相比，此类设备必须具有更高的运动分辨率和刚度。所提出的闭环差动液压或空气静力致动器具有纳米分辨率、几个10 kN/μm的刚度以及静液压致动器的±30μm的范围和空气静力的±10μm的范围。介绍了执行器的基本结构和性能。
Error correcting devices for motion accuracy are important for developing ultra-precision machine tools overcoming restriction of motion accuracy in the conventional machine tools. Such devices have to be qualified for higher resolution of motion and stiffness than in the conventional mechanism. Proposed closed looped differential hydro-or aerostatic actuator has a resolution of nanometer, a stiffness of several 10 kN/μm and a range of±30 μm for hydrostatic actuator and±10 μm for aerostatic. The basic construction and the performance of the actuator are presented.