Influence of anode geometry on electric field distribution and crater profile using a glow discharge lamp
Influence of anode geometry on electric field distribution and crater profile using a glow discharge lamp
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使用辉光放电灯阳极几何形状对电场分布和火山口轮廓的影响
DOI：
10.1039/ja9920700707
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发表时间：
1992
影响因子：
3.4
通讯作者：
M. Adamik
中科院分区：
文献类型：
--
作者：
D. Demény;L. Szücs;M. Adamik
辉光放电表面分析的深度分辨率取决于弹坑的形状和新溅射表面的粗糙度。坑底（凸度）的平面度偏差和表面粗糙度随时间增加，因此深度分辨率降低。弹坑深度和电势与阳极圆柱半径呈指数关系，可用同一类型的函数描述。阳极的几何形状有相当大的影响，火山口的轮廓，这可以解释的电位的变化。电位函数的指数特性随阳极圆柱直径的增大而减小。阳极圆柱体的直径越大，火山口底部的中间就越平坦。通过使用陶瓷管作为阳极管的间隔物，为了限制燃烧点，放电电压和压力的优化导致获得几乎平坦的火山口轮廓。
Depth resolution in glow discharge surface analysis depends on the shape of the crater and on the roughening of the new sputtered surface. The deviation from flatness of the crater bottom (convexity) and the surface roughening increase with time and, therefore, the depth resolution decreases. The crater depth and the electric potential have an exponential dependence on the radius of the anode cylinder and can be described by the same type of function. The anode geometry has a considerable influence on the crater profile, which can be explained by the variation in the electric potential. The exponential character of the potential function decreases with increasing diameter of the anode cylinder. The larger the diameter of the anode cylinder the flatter the middle of the crater bottom becomes. By using a ceramic tube as a spacer for the anode tube, in order to restrict the burning spot, optimization of the discharge voltage and pressure results in an almost flat crater profile being obtained.