Spatial Variation of Negative Oxygen Ion Energy Distribution in RF Magnetron Plasma with Oxide Target
Spatial Variation of Negative Oxygen Ion Energy Distribution in RF Magnetron Plasma with Oxide Target
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DOI：
10.1143/jjap.48.116004
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发表时间：
2009-11-01
影响因子：
1.5
通讯作者：
Toyoda, Hirotaka
中科院分区：
文献类型：
--
作者：
Ishijima, Tatsuo;Goto, Kazuya;Toyoda, Hirotaka
使用带有能量分析仪的质量分析仪测量了射频磁控等离子体中负氧（O（-））离子的能量分布及其空间变化，在溅射MgO过程中观察到动能高于50 eV的O（-）离子观察到O（-）能量分布的空间变化，并使用简单的等效电路模型（C）进行解释2009日本应用物理学会
The energy distribution of negative oxygen (O(-)) ions and its spatial variation was measured in an RF magnetron plasma using a mass analyzer with an energy analyzer O(-) ions with kinetic energies higher than 50 eV were observed during the sputtering of MgO Spatial variation of the O(-) energy distribution was observed and was explained using a simple equivalent circuit model (C) 2009 The Japan Society of Applied Physics