Development of Quantitative Laser Ionization Mass Spectrometry (LIMS)

奥多姆博士和他在Charles Evans and Associates的同事最近完成了一项第一阶段研究，以评估激光质谱仪为薄电介质薄膜提供定量和定性的元素和分子微观分析的可行性。第二阶段研究将涉及薄膜标准的制备和表征、提高离子探测系统的线性动态范围以及定性和定量分析研究。如果这项技术成功，将对薄膜器件的制造和表征产生重大影响。

Dr. Odom and his colleagues at Charles Evans and Associates recently completed a Phase I study to evaluate the feasibility of laser mass spectrometry providing quantitative and qualitative elemental and molecular microanalysis of thin dielectric films. The research in the Phase II study will involve preparation and characterization of thin film standards, enhancement of the linear dynamic range of the ion detection system and qualitative and quantitative analytical investigations. The technique, if successful, will have a major impact on the fabrication and characterization of thin film devices.