Acquisition of Rutherford Backscattering Analysis System

卢瑟福背散射光谱法（RBS）特别具有 发展成为薄膜的主要分析技术， 补充了现有仪器的功能， 强调整体表征或表面分析。 RBS 提供良好的元素特异性。 成分信息 是定量的，分析是非破坏性的。 使用仪器的研究项目相当 多样性，并表明对这项技术的兴趣日益增长 在材料科学界。 的主要用户 设备强调与薄膜、半导体 材料和界面结构。 辅助用户利用 RBS表征涉及的材料和反应， 半导体工艺中的腐蚀和分离过程 以及等离子体聚变应用中。 的大力支持 大学和工业界的消息来源将有助于购买 RBS系统。

Rutherford Backscattering Spectrometry (RBS) in particular has evolved into major analytical technique for thin film and complements that available from existing instrumentation which emphasizes either bulk characterization or surface analysis. RBS offers good elemental specificity. The compositional information is quantitative and the analysis is nondestructive. The research projects using the instrumentation are quite diverse, and indication of the growing interest in this technique within the materials science community. The major users of the equipment emphasize areas related to thin films, semiconductor materials and interfacial structures. Auxiliary users utilize RBS to characterize the materials and reactions involved in corrosion and segregation processes, in semiconductor technology and in plasma fusion applications. Substantial support from the university and industrial sources will contribute to the purchase of the RBS system.