Strategic Manufacturing Initiative: Research in Ultra Precision Machining

这项多学科的研究旨在开发超精密加工技术。假定有三个主要任务：(1)开发基于全球定位系统卫星处理技术的新的和新的光学方法来改进计量，(2)开发层流液压装置，提供平稳的无振动驱动和主轴驱动，并改进机器温度控制，以及(3)人工智能的计算技术和方法的实施，以自动化从给定机器获得最终精度所需的一些建模过程。从这三项任务中获得的知识将被结合到一台中等规模但实用的钻石车床的制造中，以促进精密加工技术的发展，特别是应用于短波光刻光学元件的制造。

This multi-disciplinary research is directed at developing ultra precision machining techniques. Three main tasks are postulated: (1) the development of new and novel optical methods to improve metrology based on Global Positioning System satellite processing techniques, (2) the development of laminar flow hydraulic devices which provide smooth vibration-free actuation and spindle drive with improved machine temperature control, and (3) implementation of the computational technology and approach of artificial intelligence to automate some of the modeling procedures required to attain the ultimate in precision from a given machine. The knowledge gained from these three tasks will be combined in the building of a modest scale but realistic diamond turning machine to advance the technology of precision machining especially as it applies to the fabrication of optics for short wave form lithography.