Development of an Atomic Force Microscope for Use in Ultra-High Vacuum

本项目将设计和建造一台适用于超高真空环境的原子力显微镜（AFM）。AFM将具有可互换的悬臂-尖端组件，原位样品交换，以及用于尖端表征的场离子显微镜（FIM）。AFM将允许对附着力、磨损和表面微观结构进行基础研究。特别是，纳米尺度的研究将进行以下工作：(a)针尖与样品接触引起的传质；(b)纳米尺度表面压痕和薄膜力学性能；(c)试样与试样之间的摩擦力；(d)接触式和非接触式成像的表面结构。AFM将整合到现有的特高压表面分析系统中，该系统配备了俄歇光谱，离子溅射，以及薄膜的原位聚合物和金属气相沉积。研究将集中在非导电材料的表面特性上，特别是陶瓷、聚合物及其复合材料。在这些材料上的金属薄膜和金属氧化物也将被研究。FIM将允许在良好表征条件下研究接触过程中的尖端损伤和传质。超高压AFM/FIM系统也将能够进行扫描隧道显微镜研究。

The design and construction of an atomic force microscope (AFM) suitable for operation in an ultra-high vacuum environment (UHV) will be carried out in this project. The AFM will have interchangeable cantilever-tip assemblies, in situ sample exchange, and a field ion microscope (FIM) for tip characterization. The AFM will permit fundamental studies of adhesion, wear, and surface microstructure. In particular, nanometer scale studies of the following will be carried out: (a) mass transfer caused by contact between the tip and sample; (b) nanometer scale indentation of surface and thin film mechanical properties; (c) frictional forces between the tip and sample; (d) surface structure by imaging in contact and non-contact modes. %%% The AFM will be incorporated into an existing UHV surface analysis system equipped for Auger spectroscopy, ion sputtering, and in situ polymer and metal vapor deposition of thin films. Research will focus on the surface properties of non-conducting materials, specifically ceramics, polymers, and their composites. Thin films of metals and metal oxides on these materials will also be studied. The FIM will allow the study of tip damage and mass transfer during contact under well characterized conditions. The UHV AFM/FIM system will also be capable of scanning tunneling microscopy studies.