NSF Young Investigator: The Use of Electrohydrodynamic Impedance Spectroscopy for Characterization of Anodic Films

这是对电动力学（EHD）阻抗谱作为研究阳极形成薄膜的一种手段的重要评价。第二个目标是建立电抛光的机理。采用交流阻抗谱法和EHD阻抗谱法研究了铜在浓磷酸和中性盐电解质中的电抛光过程。以前的研究表明，在中性盐电解质中，电抛光过程中电极表面会形成盐膜。用交流阻抗测定了这些薄膜的电性能，并用EHD阻抗监测了薄膜生长过程中电性能的瞬态变化；这导致了对薄膜的结构性质和传导机制的推断。相反，当金属在浓缩酸中进行电抛光时，是否会形成固体膜已经确定。这是用EHD阻抗来检验的，它也可以测试电抛光的替代机制。本研究结果可直接应用于电子和半导体工业生产过程的监测和控制。

9358380 West This is a critical evaluation of electrodrodynamic (EHD) impedance spectroscopy as a means of investigating anodically formed films. A second objective is to establish the mechanisms of electropolishing. Alternating - current (AC) and EHD impedance spectroscopy methods are used to study the electropolishing of copper in concentrated phosphoric acid and in a neutral-salt electrolyte. It has been shown previously that a salt film forms on the electrode surface during electropolishing in neutral-salt electrolyte. The electrical properties of these films are determined with AC impedance, and transient changes in electrical properties with film growth are monitored by EHD impedance; this leads to inferences about structural properties and mechanisms of conduction in the films. In contrast, it has been established whether a solid film is formed when metals are electropolished in concentrate acids. This is examined with EHD impedance, which can also test alternatives mechanisms for electropolishing. The result of this research are directly applicable to monitoring and control of production processes used in the electronics and semiconductor industries.