Fullerene Precursor Low Temperature Diamond Film Deposition on Electronic Substrates

9361391 Arya热管理是二维和三维多芯片模块（MCM）设计的关键方面之一，以确保电子设备在增加功能密度时的可靠性。金刚石的导热性是已知的最高的，但它还是一种电绝缘体。在先进的MCM封装概念中，提出在高导热金属基复合材料散热器上沉积高质量的金刚石膜，这将使粉末耗散达到数百瓦。富勒烯化学的最新进展表明，C60、C70等球状分子的五边形碳原子主要是Sp3水化的，并且在空间上与金刚石相当接近。MER已经证明，这些原子在高能等离子体中的少量重排可以导致富勒烯转变为钻石。这种独特的富勒烯气相前驱体工艺将被证明和优化，以在MMC和其他电子衬底上以非常高的生长速率和低温生产出高质量的薄层和厚层金刚石薄膜。将研究单一、混合和磁增强等离子体系统，以及不同的等离子体气体化学，以生产多晶金刚石膜，以及具有地质尺寸和质量的独立金刚石膜，这将为第二阶段优化和扩大规模以经济地生产金刚石膜奠定基础。* * *

9361391 Arya Thermal management is one of the critical aspects in the design of the 2 and 3 dimensional multichip modules (MCM's) to ensure reliability at increased functional densities in electronic devices. Diamond has the highest know thermal conductivity and yet is an electrical insulator. It is proposed to deposit high quality diamond films on high thermal conductivity metal matrix composite heat sinks which will allow powder dissipation of several hundreds of watts in the advance MCM packaging concepts. Recent developments in fullerene chemistry show that the carbon atoms in the pentagons of the spheroidal molecules of C60, C70, etc are predominantly Sp3 hydribdized and are sterically fairly close to the diamond. MER has demonstrated that a small amount of rearrangement of these atoms in highly energetic plasma can result in transformation of fullerenes into diamond. This unique fullerene vapor phase precursor process will be demonstrated and optimized to produce will bonded, high quality thin and thick diamond films at very high growth rates and at low temperatures on the MMC and other electronic substrates. Single, hybrid and magnetically enhanced plasma systems will be investigated along with different plasma gas chemistries to produce polycrystalline diamond films as well as free standing film of geological size and quality diamond which will establish a basis for Phase II optimization and scale-up to economically produce diamond films. ***