Development of Back Illuminated CCDs

9500290小迈克尔技术已经发展成用于天文观测的薄的、黑色照明的电荷耦合器件(Ccd)探测器。这些技术已经成熟到现在它们被常规地应用于来自几个不同制造商的许多不同格式的探测器。该项目将这一发展扩展到对科学界，特别是天文学具有重要意义的几个新领域。将开发新的技术来对目前处于半导体制造技术前沿的超大尺寸ccd(10 cm2,2048x2048像素)进行薄化和优化。这些大幅面器件对于构建覆盖大望远镜和大望远镜光谱仪的巨大焦面的CCD马赛克是必要的。将要开发的新技术包括非常大的面积变薄，通过简化的电气互连来封装大型设备以实现平坦且通常是可操作的方法，以及在变薄之前在低温下表征探测器的能力。其次，这些工艺将扩展到超薄，并优化计划用于几乎所有大型望远镜的有源和自适应光学仪器所需的非常小的高速读出设备。这些探测器必须在可见光和近红外波段具有尽可能高的量子效率，才能在极短的曝光时间内获得足够的信噪比。将要开发的技术将为整个科学界所用。背光设备对天文学以外的许多科学学科都非常重要。物理、化学、工程和医学都需要在这里开发的微光、宽带成像探测器。***

ABSTRACT 9500290 Lesser, Michael Techniques have been developed to produce thinned, black illuminated charge-coupled device (CCD) detectors for astronomical observations. These techniques have matured to the point where they are now routinely applied to detectors of many different formats from several different manufacturers. This project extends this development into several new areas of importance to the scientific community, and particularly to astronomy. New techniques will be developed to thin and optimize the very large format CCDs ( 10 cm 2, 2048x2048 pixels) which are now at the forefront of semiconductor manufacturing technology. These large format devices are necessary for the construction of CCD mosaics to cover the huge focal planes of large telescopes and large telescope spectrographs. The new techniques to be developed include very large area thinning, methods to package large devices for flat and often buttable operation with simplified electrical interconnections, and the capability to characterize the detectors at cryogenic temperatures prior to thinning. Second, the processes will be extended to thin and optimize the very small, high speed readout devices required for the active and adaptive optics instrumentation planned for nearly all large telescopes. These detectors must have the highest possible quantum efficiency in the visible and near-IR to obtain sufficient signal-to-noise in the extremely short exposure times required. The techniques to be developed will be available to the entire scientific community. Back illuminated devices are of great important to many scientific disciplines other than astronomy. Physics, chemistry, engineering, and medicine are all in need of the low light level, wide bandpass imaging detectors which will be developed here. ***