SBIR Phase I: New, Reconfigurable Micro-elecro-mechanical System (MEMS) Based Grating for Optical Sensors

* 摘要 小行星9661476 这个小企业创新研究第一阶段项目将确定生产基于微机电系统（MEMS）的可重构光栅的可行性。这种新设备将成为下一代紧凑型光谱仪器的核心。需要对这种MEMS器件的操作进行基础研究，以优化其操作并使其能够广泛应用。具体来说，第一阶段的努力将集中在完善MEMS光栅阵列，其统治间距可以重新配置在真实的时间，以允许快速，全光谱分析的几个通带的关键准确的实验室和现场准备的传感器系统。目标包括生产和封装的几个原型微光栅和开关性能，光学效率和光谱分辨率的测量。利用InterScience在电光技术和MEMS领域开发的专业知识，第一阶段的研究工作将试图建立这种MEMS光栅的操作，并开发一种将其集成到紧凑的光域光谱系统中的设计。第一期工程将结合联合收割机材料、机械和光学的研发，为第二期工程的全面实施铺平道路。 拟议研究的商业应用涉及将全新的光谱仪器推向市场，如大气分析，远程监控以及紧凑的压力和化学传感。 此外，这种新仪器在创新的心脏治疗模式中也有医疗应用。 ***

*** ABSTRACT 9661476 Castracane This Small Business Innovation Research Phase I project will establish the feasibility of producing a micro-electro-mechanical system (MEMS) based, reconfigurable optical grating. This new device will form the heart of the next generation of compact spectroscopic instruments. Fundamental research into the operation of such MEMS devices is required to optimize their operation and enable widespread applications. Specifically, this Phase I effort will focus on perfecting a MEMS grating array whose ruling spacing can be reconfigured in real time to allow for rapid, full spectral analysis of several passbands critical for accurate laboratory and field-ready sensor systems. Objectives include production and packaging of several prototype micro-gratings and measurement of switching performance, optical efficiency and spectral resolution. Exploiting the expertise that InterScience has developed in both electro-optic technology and the MEMS field, the Phase I research effort will attempt to establish the operation of such a MEMS grating and develop a design for its integration into a compact, optical domain spectroscopic system. This Phase I project will combine material, mechanical and optical research and development and pave the way for full implementation in Phase II. Commercial applications of the proposed research involve bringing fundamentally new spectroscopic instruments to market in areas such as atmospheric analysis, remote surveillance, and compact pressure and chemical sensing. In addition, there exist medical applications for this new instrument in innovative cardiac treatment modalities. ***