SBIR Phase I: A Novel Sensor for Deep Sea Applications

* 9760219爵 这个小型企业创新研究（SBIR）第一阶段项目致力于深海应用的新型压力传感器。 现有技术的压力传感器是（1）压阻式，（2）电容式，或（3）压电式。 前两类传感器需要能量源来产生信号，压电型传感器需要温度补偿。 此外，信号通常仅在窄范围内是线性的。 新的压力传感器不需要能源，信号在大的压力范围内是线性的，并且与温度无关。 虽然深海应用的目标是在这里，轻微的修改传感器可以扩大工作温度范围高达700（C）。 这些压力传感器将在有和没有放大器的情况下制造。 传感器响应将在宽的压力和温度范围内表征。 将探讨利用显微照相术进行微加工和集成的可行性。 直接安装压力传感器监测海洋生物是本研究的一个目标。 新型压力传感器的潜在商业应用包括用于以下的压力传感器：（1）监测深海中的生命，（2）油井测井，（3）航空航天工业，（4）汽车制造，（5）压力容器，（6）化学工业，以及（7）一般工业用途。 ***

*** 9760219 Jue This Small Business Innovation Research (SBIR) Phase I project addresses novel pressure sensors for deep sea applications. State-of-the-art pressure sensors are either (1) piezoresistive, (2) capacitive, or (3) piezoelectric. The first two classes require an energy source for signal generation, and piezo-type sensors require temperature compensation. Further, the signal usually is linear over only a narrow range. The new pressure sensor does not require an energy source, the signal is linear over a large pressure range, and it is temperature independent. Although deep sea application is targeted here, a slight modification of the sensor can extend the operating temperature range up to 700(C. These pressure sensors will be fabricated with and without an amplifier. The sensor response will be characterized over a wide pressure and temperature range. Feasibility of microfabrication and integration using photomicrolithography will be explored. Direct mount pressure sensors for monitoring marine life is an objective of this research. Potential commercial applications of the novel pressure sensors include pressure sensors for : (1) monitoring life in deep sea, (2) oil well logging, (3) aerospace industry, (4) automotive manufacture, (5) pressure vessels, (6) chemical industry, and (7) general industrial use. ***