Acquisition of Instruments for Microsystems Research and Development

该主要研究仪器（MRI）奖支持购买一个能量色散x射线荧光（EDXRF）单元和一个微粒子图像测速仪（mPIV），以协助路易斯安那州立大学（LSU）几个部门继续进行微系统研究、开发和教育工作。材料加工步骤的分析和控制对新器件的开发和制造以及新材料的开发至关重要。EDXRF系统将为LSU提供一种目前无法获得的化学和厚度分析方法，使其能够测量高纵横比组件的成分剖面。路易斯安那州立大学目前正在开发的许多微系统都涉及微流体装置和过程（例如微通道、泵、热交换器、流量控制装置、生物分析仪器、燃料喷射器和燃烧器喷嘴的流体执行器）。迄今为止，微流体系统的研究只能在理论和模拟层面上进行，而实验由于缺乏能够提供此类设备局部信息的测量方法而受到限制。微粒子图像测速仪（mPIV）系统将提供测量局部速度场的能力，并在微米级流体系统中可视化流动。该仪器将使研究人员能够研究微流体流动的物理特性，这对路易斯安那州立大学制造的微流体装置的设计和优化至关重要。通过国家科学基金会的拨款获得的系统，以及路易斯安那州立大学J. Bennett Johnston高级微结构和器件中心的同步加速器资源，将为路易斯安那州立大学的研究人员提供在实际应用的微系统开发和评估中发挥主导作用的机会。

ABSTRACTProposal Number: CTS 9977576Principal Investigator: E. PodlahaThis Major Research Instrumentation (MRI) award supports the acquisition of an Energy-Dispersive X-ray Fluorescence (EDXRF) unit and a Micro Particle Image Velocimeter (mPIV) to assist the continuing microsystems research, development and educational efforts for several departments at Louisiana State University (LSU). The analysis and control of materials processing steps is essential to the development and fabrication of new devices and the development of novel materials. The EDXRF system will provide a currently unavailable method of chemical and thickness analysis to LSU, giving the capability of measuring composition profiles throughout high aspect ratio components. Many of the microsystems presently under development at LSU involve microfluidic devices and processes (e.g. micro-channels, pumps, heat exchangers, flow control devices, bioanalytical instruments, fuel injectors and fluidic actuators for combustor nozzles). Studies of micro-fluidic systems have been, thus far, possible only on the theoretical and simulation level, while experiments have been limited by the scarcity of measurement methods that can provide local information about such devices. The micro Particle Image Velocimeter (mPIV) system will provide the ability to measure local velocity fields and to visualize the flow in micrometer scale fluidic systems. This instrument will enable researchers to study the physics of micro-fluidic flows critical to the design and optimization of micro-fluidic devices that are fabricated at LSU. The systems acquired through this NSF grant together with the synchrotron resource at the J. Bennett Johnston Sr. Center for Advanced Microstructures and Devices at LSU will provide researchers at LSU with the opportunity to play a leading role in the development and evaluation of microsystems for practical applications.