High Pressure Microhollow Cathode Discharges

这是一项关于微空心阴极放电（mhcd）中基本等离子体物理和化学的研究，目的是确定(1)微空心阴极放电中等离子体边界层的特征长度，以提供相反阴极落之间耦合机制的信息；(2)决定准分子生成速率的等离子体参数，如电子密度、电子能量、气体温度、放电电流和放电电压；(3)高压MCHDs的光学增益，目的是解释它们作为微准分子激光介质的可能用途。实验研究得到了计算机模拟的支持。计算研究了氙-氯离子mhcd中整体放电参数与等离子体基本特性的关系以及准分子激光增益的标度。微空心阴极放电（MHCDs）是空心阴极和平面或空心阳极之间的非热高压气体放电，电极尺寸在100微米范围内。高浓度的高能电子和高中性气体密度有利于准分子形成等三体过程。这与设计和操作的简单性一起，使这些系统成为光源、带电粒子源和微等离子体反应器的有吸引力的候选者。

This is an investigation of fundamental plasma physics and chemistry in microhollow cathode discharges (MHCDs) with the objectives of determining (1) characteristic lengths of plasma boundary layers in microhollow cathode discharges to provide information on coupling mechanisms between opposite cathode falls; (2) plasma parameters that determine the rate of generation of excimers, such as electron density, electron energy, gas temperature, discharge current and discharge voltage; and (3) the optical gain of high-pressure MCHDs with the goal of explain their possible use as a micro excimer laser medium. The experimental studies are supported by computer modeling. The relations of global discharge parameters to fundamental plasma properties and the scaling of excimer laser gain in xenon-chloride MHCDs are investigated computationally.Microhollow cathode discharge (MHCDs) are nonthermal high-pressure gas discharges between a hollowcathode and a planar or hollow anode with electrode dimensions in the range of 100 micrometers. The large concentration of high-energy electrons and the high neutral-gas density favor three-body processes such as excimer formation. This along with the simplicicty of design and operation, make these systems attractive candidates for light sources, sources of charged particles, and micro plasma reactors.