SGER-Sensors on Flexible Substrates for Smart Skin

南方卫理公会大学唐纳德·P·巴特勒和泽内普·切利克-巴特勒探索性研究小额助学金(SGER)：70,000-12美元。智能皮肤柔性衬底传感器这是一年的探索性研究小额助学金(SGER)。该项目涉及柔性衬底上悬浮式微机械传感器的开发。该项目的成果将为其他微机械传感器的生产奠定基础，如压力/应变传感器、“发状”触摸和流动传感器，以及柔性基板上的加速计。柔性衬底可以作为人类和机器人敏感皮肤的基础，在皮肤上分布传感器，以提供触觉或监测佩戴者的生理。在柔性衬底上开发钒氧化物测辐射热计或钛酸铅及类似氧化物热释电探测器的一个主要障碍是探测器材料所需的热平衡与柔性衬底的低最高温度之间的不相容。这项工作将通过使用PI的专利微测辐射热计材料解决两个热预算之间的不兼容性：半导体氧化钇钡铜(YBaCuO)。这种红外敏感材料的沉积温度不超过150℃，利用射频溅射可以在常温下沉积出高质量的纳米晶半导体YBaCuO薄膜。由于对晶化没有要求，所以不需要高温退火步。该项目的资金由以下两个NSF部门提供：IIS/CEISE--50,000美元ECS/ENG--20,000美元

Abstract0090667Donald P. Butler and Zeynep Celik-ButlerSouthern Methodist UniversitySmall Grants for Exploratory Research (SGER): $70,000 - 12 mos.Sensors on Flexible Substrates for Smart SkinThis is a one-year Small Grant for Exploratory Research (SGER). This project concerns the development of suspended, micromachined sensors on flexible substrates. The project's results will form a basis for the production of other micromachined sensors such as pressure/strain sensors, "hair-like" touch and flow sensors, and accelerometers on flexible substrates. Flexible substrates can serve as the basis of a sensitive skin for humans and robots where sensors are distributed over the skin to provide the sense of touch or monitor the physiology of the wearer. A major obstacle in the development of vanadium oxide bolometers or lead titanate and similar oxide pyroelectric detectors on flexible substrates is the incompatibility between the thermal budget required by the detector material and the low maximum temperature of the flexible substrate. This work will solve the incompatibility between the two thermal budgets by the use of the PI's patented microbolometer material: semiconducting Yttrium Barium Copper Oxide (YBaCuO). The deposition temperature for this infrared sensitive material does not exceed 150 C. High quality nanocrystalline, semiconducting YBaCuO films can be deposited using rf sputtering at ambient temperature. Since there is no requirement for crystallization, high-temperature annealing steps are not necessary. The funding for the project is provided by two NSF divisions, as follows: IIS/CISE - $50,000 ECS/ENG - $20,000