Magnetoelastic Interactions in Giant Magnetostriction Multilayers for Adaptive Micro-systems Transducers

PI：R. C. Wetherhold和Harsh Deep Chopra，纽约州立大学布法罗分校提案编号：0099830提案标题：自适应微系统传感器巨磁致伸缩多层膜中的磁弹性相互作用项目摘要：研究集中在Tb-Fe或Sm-Fe膜的高应变磁化率和低开关场“巨”磁致伸缩，其夹在高磁化强度的软磁体之间，由于在这些多层膜中应力和磁化之间的层间相互作用，理解和有利地控制磁弹性耦合是这些研究的关键目标。 一个整体的能量函数正在开发的所有磁，机械和耦合能量的组合，以了解磁弹性耦合。 多层膜被溅射沉积为层厚度和双层数的函数，沉积后应力退火以优化其磁弹性行为。 薄膜的磁性结构和微观结构的特点是使用分析电子显微镜，X射线衍射，扫描探针显微镜。 优化的薄膜正在作为微机电系统（MEMS）和生物MEMS的自适应组件进行测试。 除了由于磁弹性相互作用而观察到的新现象的丰富性之外，这些研究还显著影响了MEMS和生物MEMS的快速发展领域。 例子包括具有高动态响应的高效微动开关、激光束偏转器、流体喷射偏转器、阀、超声波马达、微型夹持器和微型泵。 教育影响包括研究生和本科生的积极培训和参与，以及来自布法罗地区内城高中的高中生。

PIs: R. C. Wetherhold and Harsh Deep Chopra, State University of New York at BuffaloProposal Number: 0099830Proposal Title: Magneto-Elastic Interactions in Giant Magnetostriction Multilayersfor Adaptive Micro-Systems TransducersProject Abstract: Research is focused on high strain susceptibility and low switching field "giant" magnetostriction of Tb-Fe or Sm-Fe films, which are sandwiched between high magnetization soft magnets, such as Fe-Co. Due to inter-layer interactions between stress and magnetization in these multilayers, understanding and controlling favorably the magneto-elastic coupling is a key objective of these studies. An overall energy function is being developed for the combination of all magnetic, mechanical, and coupling energies, in order to understand the magneto-elastic coupling. Multilayers are being sputter deposited as a function of layer thickness and number of bilayers, with post-deposition stress annealing to optimize their magneto-elastic behavior. Films are being characterized for their magnetic structure and microstructure using analytical electron microscopy, x-ray diffraction, and scanning probe microscopy. Optimized films are being tested as adaptive components of micro-electro-mechanical systems (MEMS) and Bio-MEMS. In addition to the richness of new phenomena that are being observed due to magneto-elastic interactions, these studies impact significantly the rapidly evolving fields of MEMS and bio-MEMS. Examples include highly efficient micro-switches, laser beam deflectors, fluid jet deflectors, valves, ultrasonic motors, micro-grippers and micro-pumps, with high dynamic response. Educational impact includes active training and participation of graduate and undergraduate students, as well as high school students from Buffalo area inner city high schools.