Single Molecule Spectroscopic Imaging as an Optical Nanoprobe for Chemically Amplified Photoresists

耶鲁大学的Robert D. Grober教授和Shipley公司的James Cameron博士由分析和表面化学项目资助。这项工作的重点是单分子光谱作为探测光阻剂的一种方法。该团队正在使用ph敏感的荧光染料分子在纳米级化学放大的光刻胶中探测光产生的酸。酸和氟通过抗蚀剂的扩散将被测量，提供洞察这些系统的运输和动力学。单分子光谱学是一种相对较新的激光方法，在过去的十年中，由于极其灵敏的探测器而成为可能。它允许在纳米尺度上对现象进行光学表征。它还没有找到太多的工业用途。在光刻过程中精确控制光酸的空间分布对于最大限度地提高光刻分辨率至关重要。研究结果对纳米技术和半导体工业具有重要意义。

Professor Robert D. Grober of Yale University and Dr. James Cameron of Shipley Corporation are funded in this GOALI project by the Analytical and Surface Chemistry Program. The work is focused on single molecule spectroscopy as a way of probing photoresists. The team is using pH-sensitive fluorescent dye molecules to probe photogenerated acids on the nanoscale in chemically-amplified photoresists. Diffusion of acids and fluors through the resists will be measured, providing insight into the transport and kinetics of these systems. Single molecule spectroscopy is a relatively new laser method made possible in the past decade by extremely sensitive detectors. It allows optical characterization of phenomena at the nanoscale. It has not yet found much industrial use. Precise control of the spatial distribution of photoacid during lithographic processing is paramount for maximizing lithographic resolution. The results of the study are significant for nanotechnology and will be of benefit to the semiconducting industry.