Gas-Phase Anti-Stiction and Lubrication for MEMS Applications

提案ID：0408369PI：Kim，Seong组织：宾夕法尼亚州立大学标题：MEMS应用的气相防粘和润滑为了充分发挥MEMS设备的潜力，必须将这些设备中的粘滞、摩擦和磨损降至最低。这些都是MEMS技术的关键挑战，限制了器件的实现和可靠性。这项拟议的研究开发了一种气相润滑工艺，允许将润滑油分子输送到MEMS器件的所有表面，包括侧壁以及悬挂部件的下方，同时防止过量输送可能导致器件损坏的润滑油。气相润滑还将允许设备的在用润滑，即润滑分子可以通过气相连续输送到工作面。在汽车、船舶、飞机等现代机械中，在工作过程中不断向工作面供应润滑剂是液体润滑剂成功和广泛使用的关键。目前，几乎所有的运动和摩擦部件都是用粘性液体材料润滑的。遗憾的是，粘性液体的存在给MEMS器件的运行带来了严重的功耗问题。这是固相润滑(如表面涂层)得到最广泛研究的主要原因之一。然而，任何表面涂层都容易磨损，这将限制设备的可靠性。润滑分子的气相输送到工作表面将避免这些与液体和固体润滑剂相关的问题，实现MEMS器件的抗粘、有效润滑和抗磨操作，而不会干扰器件的机械运动、光学反射和电接触等功能。气相润滑可以单独使用，也可以与固相润滑联合使用。智力优势：本研究将加深对固-气界面热力学吸附平衡以及吸附润滑膜中分子结构的基础了解。吸附分子膜的纳米力学研究将阐明在与MEMS和其他纳米设备操作相关的摩擦学条件下，分子膜如何改变粘着和摩擦。基于对薄膜结构和性质的基本了解，将开发一种非常有效的气相防粘和润滑工艺，用于MEMS器件的端面制造、释放和在用中的润滑。广泛的影响：气相润滑工艺适用于在宽温度范围内的操作，可以应用于MEMS器件的封装式操作以及开放结构的常温操作。这项研究的成功将刺激更多关于MEMS器件中分子封装的研究。这不仅有利于MEMS润滑的发展，也有利于其他纳米技术领域的发展。这项研究将为参与的学生提供从科学基础到工程应用的多学科培训。经过这种方式培训的学生很可能在纳米技术之前做出重大贡献，纳米技术需要多学科的问题解决技能。该项目的研究生将被提名为摩擦学家和润滑工程师协会(STLE)的埃尔默·克劳斯奖学金获得者，并被派往国家会议。在一个以本科为主的机构为本科生提供研究机会的外展计划将提供宝贵的经验，可以引导学生接受更高的学位教育。

Proposal ID: 0408369PI: Kim, SeongOrganization: Pennsylvania State UniversityTitle: Gas-phase anti-stiction and lubrication for MEMS applicationsTo realize the full potential of MEMS devices, stiction, friction and wear in these devices must be minimized. These are key challenges to MEMS technology, limiting device realization and reliability. The proposed research develops a gas-phase lubrication process that allows the delivery of lubricant molecules to all surfaces of the MEMS device including sidewalls as well as underneath suspended parts while preventing excess delivery of lubricants that can cause destruction of the device. The gas-phase lubrication will also allow in-use lubrication of the device, i.e., the lubrication molecules can be continuously delivered to the working surface through the gas phase. The continuous supply of the lubricant to the working surface while the device is working has been the key element for the success and wide use of liquid lubricants in the modern machinery such as automobiles, ships, airplanes, etc. Virtually all moving and rubbing parts are currently lubricated with viscous liquid materials. Unfortunately, the presence of viscous liquid causes severe power dissipation problems in the MEMS device operation. This is one of the main reasons that solid-phase lubrication such as surface coatings is most widely investigated. However, any surface coatings are subject to wear, which will limit the reliability of the device. The gas-phase transport of the lubrication molecules to the working surfaces will avoid these problems associated with the liquid and solid lubricants and achieve anti-stiction, effective lubrication, and anti-wear operations of MEMS devices without interfering with the device function such as mechanical motion, optical reflection, and electrical contacts. The gas-phase lubrication can be used alone or in combination with the solid-phase lubrication.Intellectual Merits: This research will improve fundamental understanding of thermodynamic adsorption equilibrium at the solid-gas interface as well as molecular structures in the adsorbed lubricant film. Nano-mechanical studies of adsorbed molecular films will elucidate how the films modify adhesion and friction under tribological conditions related to MEMS and other nano-device operations. Based on the fundamental understanding of film structures and properties, a very efficient gas-phase anti-stiction and lubrication process will be developed for end-fabrication release and in-use lubrication of MEMS devices.Broader Impacts: The gas-phase lubrication process is suitable for operation over a wide temperature range and can be applied to encapsulated operation of MEMS devices as well as open-structure, ambient operation. The success of this research will stimulate more research on molecular encapsulation inside MEMS devices. This will benefit not only the development of MEMS lubrication but also other nanotechnology areas. This research will provide participating students with multidisciplinary trainings from scientific fundamentals to engineering applications. Students trained in this way are very likely to make significant contributions in advance of nanotechnology that requires multidisciplinary problem-solving skills. The graduate student of this project will be nominated for the Elmer Klaus fellowship of the Society for Tribologists and Lubrication Engineers (STLE) as well as sent to national conferences. The outreach program offering research opportunities to undergraduate students in a primarily undergraduate institution will provide valuable experience that can lead the students to higher degree education.