MRI: Acquisition of ICP system within Two Universities/One Campus Framework

本研究的目的是在德雷克塞尔大学开发的蚀刻高纵横比的微型和纳米结构的各种聚合物，硅和玻璃的能力，通过收购电感耦合等离子体（ICP）蚀刻系统。这种能力的发展将使德雷克塞尔大学和宾夕法尼亚大学的几个纳米技术项目受益。这些项目包括3个NSF赞助的NIRT，涉及纳米元件的可编程组装和基于碳纳米管的纳米流体。 这也将有助于新型液晶器件和软凝聚态物质的研究。它将在NSF赞助的表面形态对细胞粘附影响的研究中发挥重要作用。德雷塞尔提出的ICP蚀刻能力的增加将产生广泛的影响。费城地区没有类似的工具，拟议的比较方案系统将提供给整个费城地区和其他地区的学术机构和公司。 德雷克塞尔大学和宾夕法尼亚大学在一个城市街区内，有效地形成了一个连续的大学校园。拟议的国际比较方案系统将是在两所大学/一个校园框架内建立的纳米技术研究和教育设备网络的一部分。这将直接有利于NSF IGERT项目在此框架内建立纳米技术教育。德雷克塞尔大学和宾夕法尼亚大学位于城市学区，通过有效的外展计划接触到许多贫困学生。先进的仪器，如拟议的ICP系统，有助于增加传统上代表性不足的群体对令人兴奋的先进技术的接触。

The objective of this research to develop at Drexel University the capability of etching of high aspect ratio micro- and nanostructures in various polymers, silicon, and glass by acquiring an Inductively Coupled Plasma (ICP) etcher system. The development of such capabilities will benefit several nanotechnology projects at Drexel University and at the University of Pennsylvania. These projects include 3 NSF sponsored NIRTs on programmable assembly of nanocomponents and on carbon nanotube based nanofluidics. It will also benefit research on novel liquid crystal devices and soft condensed matter. It will be highly instrumental in NSF sponsored research on effects of surface morphology on cellular adhesion.The addition of the proposed ICP etching capability at Drexel will have a broad impact. No similar tool is available in the Philadelphia region and the proposed ICP system will be available to academic institutions and corporations in the entire Philadelphia region and beyond. Drexel University and the University of Pennsylvania are within one city block from each other and effectively form one contiguous university campus. The proposed ICP system will be part of a network of equipment for nanotechnology research and education being established within the two universities/one campus framework. It will directly benefit the NSF IGERT project to establish nanotechnology education within this framework. Drexel University and Penn are located in an urban school district and reaches many underprivileged students through effective outreach programs. Advanced instrumentation such as the proposed ICP system helps increase exposure of traditionally underrepresented groups to exciting advanced technologies.