Interdepartmental Joint Development of Hands-On MEMS Using Semi-Custom Design Flow

工程机械（59）该项目正在开发一个本科生动手实验室课程，在微机电系统（MEMS）与机械工程，电气工程和材料工程部门合作。该项目正在调查限制MEMS跨学科学习进步的两个关键障碍：（1）来自不同部门专业的不兼容的先决条件背景和（2）设施，成本，时间和人员专业知识方面的高开销。克服这些障碍的方法集中在通过使用半定制设计流程和中等分辨率掩模技术来降低成本和设备障碍，以增加可负担性和开放式学生学习过程的实践。成果和活动包括：1）通过阐明预科课程而不仅仅是课程列表来降低障碍; 2）改编其他机构的MEMS最佳实践; 3）开发学生贡献的摘要; 4）提供对项目目标进展的书面评估，并将结果提交给工程学院课程委员会; 5）通过工程教育出版物传播项目的结果; 6）开发MEMS模块，以支持该机构在实践微型工程方面的推广计划; 7）开发一个部分标准化的掩模组和工艺配方的可共享数字图书馆; 8）制定一个书面计划，以持续评估和持续改进他们的MEMS实验室课程，工艺能力以及这将如何有助于研究和独立研究，以及9）将项目的结果制度化。该项目是让学生合作，并评估他们的表现（1）提供反馈的学生学习的有效性，（2）确定如何降低人为障碍进入未来的学生感兴趣的MEMS，（3）提高流动和技术成果的实验室活动，（4）创造一个具有挑战性的跨学科环境。领导团队正在与其强大的微电子工业支持网络合作。

Engineering-Mechanical (59) This project is developing an undergraduate hands-on laboratory course in microelectromechanical systems (MEMS) in collaboration with mechanical engineering, electrical engineering, and materials engineering departments. The project is investigating two critical barriers that limit advancement of interdisciplinary learning in MEMS: (1) incompatible prerequisite background from differing departmental majors and (2) high overhead in terms of facilities, cost, time, and personnel expertise. The method to overcome those barriers focuses on reducing the cost and equipment barrier by using semi-custom design flow and medium-resolution mask technology to increase the affordability and practice of open-ended student learning processes.Outcomes and activities include: 1) Lowering obstacles by articulating pre-requisites as opposed to mere course listings; 2) Adapting MEMS best practices from other institutions; 3) Developing a summary of student contributions; 4) Providing a written evaluation of the progress toward project goals and submitting the results to College of Engineering curriculum committee; 5) Disseminating the results of the project through engineering education publications; 6) Developing MEMS modules that will support the institutions outreach program in hands-on microengineering; 7) Developing a shareable digital library of partially standardized mask sets and process recipes; 8) Developing a written plan for on ongoing assessment and continual improvement of their MEMS laboratory course, process capabilities and how this would contribute to research and independent study, and 9) Institutionalizing results of the project. The project is engaging students collaboratively and evaluating their performance to (1) provide feedback on the effectiveness of student learning, (2) determine how to lower artificial barrier-to-entry for future students interested in MEMS, (3) enhance the flow and technical outcomes of laboratory activities, and (4) create a challenging interdisciplinary environment. The leadership team is collaborating with their strong microelectronics industrial support network.