SGER: Noise Reduction in Micro-machined Acoustic Sensors Using Digital Feedback

道具：0643055 PI：伊娃吴建议的研究重点是面向控制的建模新开发的仿生指向性麦克风，数字反馈阻尼方案的设计和性能分析，以及数字控制麦克风的实现和实验验证。阻尼方案将被应用到麦克风，它采用了高度创新的膜片设计，通过批量微加工技术制造，和一种新的光学传感方案，以提供阅读的膜片运动。通过引入电容驱动，该系统成为反馈控制的理想平台，具有显著增强微传感器性能的潜力。目标。本研究的主要目的是开发一种主动反馈系统，以抑制硅微传感器检测声音和振动中不必要的共振。除了改善在频域和时域的响应，本研究的目的是实现显着的好处，在设备的动态范围，输出信噪比，并容忍由于随机因素，在其微细加工和由于不同的操作条件下的设备的可变性。在这里检查的设备的商业应用包括高灵敏度，低噪声助听器，在声传感器网络中的传感单元，除其他外。这项研究将导致显着改善microsensortechnology通过协同国家的最先进的进步，在机械传感器设计，硅微加工，数字控制系统设计，其中包括先进的信号处理和数字硬件技术。我们在驱动和传感方面的创新激发了这项研究所产生的有条不紊的鲁棒反馈设计，将适用于一类微机电传感器系统，其中传感器的某些非线性特性到目前为止阻碍了反馈的有效使用。沿着的好处是，这项研究所带来的助听器技术的改进也将大大改善听力受损者对社会各个方面的参与。此外，这项研究自然结合了传统的机械工程和电气工程学科，因此有利于我们的努力，改革课程，更好地准备我们的学生进入竞争激烈的全球市场。

Prop: 0643055PI: Eva WuThe proposed research focuses on the control oriented modeling of a newly developed biomimetic directional microphone, on the design and analysis of performance of a digital feedback damping scheme, and on the implementation and experimental verification of the digitally controlled microphone. The damping scheme will be applied to the microphone that incorporates a highly innovative diaphragm design fabricated through bulk microfabrication techniques, and a novel optical sensing scheme to provide reading of the diaphragm motion. By also incorporating capacitive actuation, the system becomes an ideal platform for feedback control that has the potential to significantly and robustly enhance the performance of the microsensor.Objectives. The primary objective of this research is to develop an active feedback system to damp unwanted resonances in silicon microsensors for detecting sound and vibration. In addition to improving the response in both the frequency and time domains, this research aims to achieve significant benefits in device dynamic range, output signal-to-noise ratio, and tolerance to the device variability due to random factors during its microfabrication and due to varying operating conditions. The commercial applications of the device examined here include high-sensitivity, low-noise hearing aids, and sensing units in acoustic sensor networks, among others.Intellectual merit. This research will lead to significant improvement in microsensortechnology through a synergy of state-of-the-art advances in mechanical sensor design, silicon microfabrication, and digital control system design which incorporates advanced signal processing and digital hardware technology. The methodical robust feedback design that results from this research, provoked by our innovations in actuation and sensing, will be applicable to a class of microelectromechanical sensor systems where certain nonlinear characteristics of transducers have up till now precluded the effective use of feedback.Broader impacts. Along with the benefits the proposed effort will provide the improvements in hearing-aid technology resulting from this research will also lead to great improvement in the participation of the hearing impaired in all aspects of our society. In addition, this research naturally combines traditional mechanical engineering and electrical engineering disciplines, and therefore facilitates our effort to reform curricula that better prepare our students for entering the highly competitive global market.