MRI: Acquisition of chlorine based reactive ion etcher

本研究的目的是使用基于氯的反应离子蚀刻器在杨百翰大学的各种微纳米纤维项目。 现有的六个项目将立即受到影响，许多未来的项目将受益于新的反应离子蚀刻能力。 该方法是在杨百翰大学的无尘室设施中获得并安装基于氯的反应离子蚀刻机。 该机器将被充分表征，然后提供给校园范围内的研究人员和研究生和本科生实验室课程。 智力优点：由反应离子蚀刻机支持的研究将是多学科的性质，将包括新的化学和生物传感器与集成的光子学和微流体，DNA模板纳米纤维，图案化的微通道超疏水表面，RF MEMS开关具有改善的响应时间和电流承载能力，以及高温光纤传感器。更广泛的影响：新的机器和洁净室将通过一个旨在为少数民族高中生上大学和就业做准备的现有计划，帮助招募代表性不足的少数民族学生进入工程和科学领域。该项目在夏季将数百名学生带到杨百翰大学校园，并包括与洁净室设施的互动。针对科学教师及其学生的外联方案也将得到加强，让参与者亲身接触科学和技术的最前沿。最后，反应离子蚀刻机将影响附近的大学和技术公司，因为它将提供犹他州以前从未有过的宝贵资源。

The objective of this research is to use a chlorine based reactive ion etcher for a variety of micro and nanofabrication projects at Brigham Young University. Six existing projects will be immediately affected and many future projects will be benefited by the new reactive ion etch capabilities. The approach is to acquire and install a chlorine based reactive ion etcher in the cleanroom facility at Brigham Young University. The machine will be fully characterized and then made available to campus-wide researchers and for graduate and undergraduate laboratory classes. Intellectual merit: The research supported by a reactive ion etcher will be multidisciplinary in nature and will include new chemical and biological sensors with integrated photonics and microfluidics, DNA-templated nanofabrication, patterned microchannels for ultrahydrophobic surfaces, RF MEMS switches with improved response times and current carrying capability, and high temperature fiber sensors. Broader Impact: The new machine and cleanroom will aid in the recruitment of underrepresented minority students to engineering and science fields through an existing program designed to prepare minority high school students for college and careers. This program brings hundreds of students to the Brigham Young University campus during the summer and includes interactions with the cleanroom facility. Outreach programs aimed at science teachers and their students will also be enhanced by giving participants hands-on encounters with the very leading edge of science and technology. Finally, the reactive ion etcher will impact nearby universities and technology companies, as it will provide a valuable resource never before available in the State of Utah.