Grenzflächenausbildung zwischen LiNbO3 Einkristallsubstraten und Barriereschichten für den Einsatz bei Metallisierungssystemen für Oberflächenwellenstrukturen

新一代表面声波器件有新的金属化系统，如铜或高织构Al。为了达到高度复杂的设备行为，实现阻挡层是必要的。目的是产生纳米厚的势垒，阻止相互扩散，并应确保良好的附着力和表面声学行为。因此，必须优化衬底/势垒/金属化之间的界面性质。在本项目中，主要利用X射线光电子能谱(XPS)研究了LiNb(和Li-Ta_2O_3)基片与Ta-(Ti)基势垒层的界面性质。用角度分辨XPS(ARXPS)研究峰的形状变化和形态性质来研究化学信息是主要的关注焦点。阻挡层沉积前的等离子体处理是一个主要问题，但还将研究阻挡层系统的力学和热行为。这将是研究高织构铝金属化的一部分，因为在铝沉积之前，需要一个特殊的(钛)势垒。最后，计划了一些示范锯片结构的生产和测试。

Surface acoustic wave devices of new generation have new metallization systems such like Cu or high-texture Al. To reach high-sophisticated device behavior the implementation of barrier layers are necessary. Aim is to generate nm-thick barriers which hinder interdiffusion and should guarantee good adhesion and surface acoustic behavior. Thus the interface properties between substrate/barrier/metallization have to be optimized.In the project the interface properties of Li-niobate (and Li-tantalate) substrates and Ta-(Ti-) based barrier layers are studied mainly by X-ray photoelectron spectroscopy (XPS). Chemical information studied by peak shape changes and morphology properties investigated with angle-resolved XPS (ARXPS) are in the main focus of interest. Plasma treatment before barrier deposition is one major issue but also mechanical and thermal behavior of the barrier system will be studied. Included will be a part for the study of highly-textured Al metallization because before Al deposition a special (Ti) barrier is necessary. At the end the production and testing of some demonstrator SAW-structures is planned.