Wireless Passive Ceramic MEMS Sensors for High Temperature Applications

应用于高温的无线无源陶瓷MEMS传感器的研究目的：本研究的目标是开发准确且坚固耐用的无线无源高温微传感器，用于发电和飞机推进系统中涡轮发动机内部的温度和压力的现场测量。该方法是利用最近开发的多功能聚合物衍生陶瓷(PDCS)来研究两种类型的传感器。智力优势：对PDCs的研究表明，PDCs具有出色的多功能，包括在高温(高达1500 oC)下具有优异的热电性能，从而为高温传感器的设计和制造提供了直接的转换机制。为了高精度地无线传感温度和压力，需要对温度或压力敏感的高Q微波谐振器。消逝模谐振器将被开发用于测量压力，而介质谐振器将被用于测量温度。更广泛的影响：拟议的研究将推动材料科学和微波工程的前沿，并有效地将这两个交叉领域结合起来，从而推动传感器技术超越目前的状态。这项工作可以通过为潜在的性能改进提供传感技术，使涡轮机行业及其客户大大受益。最终，这项拟议工作所产生的能源利用效率的提高可以极大地帮助克服人类目前面临的能源危机，并将对如何有效利用能源产生长期影响。该计划还通过在跨学科领域培训学生，并通过奥兰多科学中心教育计划和多样性和少数族裔工程计划为K-12学生和代表性不足的群体提供实践经验，将研究与教育相结合。

Wireless Passive Ceramic MEMS Sensors for High-Temperature ApplicationsObjective:The objective of this research is to develop accurate and robust wireless passive high-temperature microsensors for in situ measurement of temperature and pressure inside turbine engines for power generation and aircraft propulsion systems. The approach is to investigate two types of sensors using the recently-developed multifunctional polymer-derived ceramics (PDCs). Intellectual Merits:Research on PDCs has revealed that PDCs possess outstanding multifunctionality including excellent thermo-electrical properties at high temperatures (up to 1500oC) thus providing direct transduction mechanisms for design and fabrication of high-temperature sensors. In order to sense the temperature and pressure wirelessly with high accuracy, high-Q microwave resonators sensitive to either temperature or pressure are necessary. Evanescent-mode resonators will be developed to measure the pressure while dielectric resonators will be used to measure the temperature. Broader Impacts: The proposed research will advance the sensor technologies beyond the current state by pushing the frontier of both materials science and microwave engineering and effectively combining these two interdisciplinary fields. This work can substantially benefit the turbine industries and their customers by providing sensing technology for potential performance improvement. Ultimately, the increased efficiency of using energy resulting from this proposed work can greatly help overcome the energy crisis that human beings are facing now and will have long-term effects on how to effectively utilize energy sources. This program also integrates research with education by training students in interdisciplinary areas and providing hands-on experience for K-12 students and underrepresented groups through the Orlando Science Center education program and Diversity and Minority Engineering Programs.