MRI: Acquisition of a Scanning Electron Microscope with e-Beam Lithographic Capability

美国得克萨斯州-圣马科斯技术概要：在纳米尺度上处理图案和图像的能力对于当今的材料科学来说是不可或缺的。收购FEI Nova NanoSEM 230，能够进行电子束(电子束)光刻的超高分辨率扫描电子显微镜(SEM)，为德克萨斯州立大学新的材料科学与工程博士项目的跨学科研究提供了必要的能力和可靠性。这种仪器消除了现有陈旧的只能进行更大规模成像的扫描电子显微镜带来的研究效率障碍，并为将物理、工程和生物科学之间的创新和发现联系起来的跨学科研究提供了平台。这种场发射(FE)扫描电子显微镜结合了高低压超高分辨率，成像分辨率为1.0 nm，在30千伏时的写入分辨率为标称为10 nm。重要的是，可以常规地进行20纳米的图案化。该系统的特点是：具有高束流能力的高稳定性超高亮度FE电子源；低图案失真和漂移；高精度工作台和图案覆盖；环保扫描电子显微镜技术；高速静电束消隐；以及用于直接电子束写入纳米结构的气体注入系统。电子束写入能力使得可以制造适用于多学科问题的结构，例如用于分子识别的基于纳米结构的光子或电子生物传感器的研究，用于更有效能量转换的纳米器件，以及磁性纳米结构的自旋物理。扫描电子显微镜？S的易访问性、易用性和一致性使电子束系统非常适合集成到我们的教育和研究项目中，使本科生、研究生和博士后受益。德克萨斯州立大学这个项目的核心教职员工预计明年将获得拉美裔服务机构的地位，他们将利用这一工具来加强外展计划，以确保不同群体的学生有最大限度的培训和研究机会。外行人总结：对于当今的材料科学来说，在纳米尺度上同时处理图案和图像的能力是不可或缺的。收购能够电子束曝光的超高分辨率扫描电子显微镜(SEM)为德克萨斯州立大学新材料科学与工程博士项目的跨学科研究提供了这一必要的能力。这种仪器消除了现有陈旧的只能进行更大规模成像的扫描电子显微镜带来的研究效率障碍，并为跨学科研究提供了平台，将物理、工程和生物科学之间的创新和发现联系起来，使健康、能源和安全应用领域的纳米材料研究取得了进展。电子束写入能力可以制造纳米级(10-7m-10-9m)的结构，适用于多学科问题，如基于纳米结构的分子识别生物传感器的研究，用于更有效能量转换的纳米器件，以及磁性纳米结构的自旋物理。扫描电子显微镜？S的易用性、易用性和一致性使电子束系统非常适合整合到我们的教育项目中，使本科生、研究生和博士后受益。德克萨斯州立大学这个项目的核心教职员工预计明年将获得拉美裔服务机构的地位，他们将利用这一工具来加强外展计划，以确保不同群体的学生有最大限度的培训和研究机会。

0923509TheodoropoulouTexas State U. - San MarcosTechnical Summary: The ability to both pattern and image at the nanoscale is indispensable for present-day materials science. The acquisition of a FEI NOVA NanoSEM 230, Ultra High Resolution Scanning Electron Microscope (SEM) capable of electron beam (e-beam) lithography provides the capability and reliability necessary for interdisciplinary research in the new Materials Science and Engineering Ph.D. program at Texas State University. This instrument eliminates barriers to research productivity presented by the existing antiquated SEM capable only for larger scale imaging, and enables the platform for interdisciplinary research linking innovation and discovery between the physical, engineering, and biological sciences. This Field Emission (FE) SEM combines high- and low-voltage ultra-high resolution with an imaging resolution of 1.0 nm and a writing resolution of nominally 10 nm at 30 kV. Importantly, 20-nm patterning can be done routinely. The system features: a high stability ultra-high brightness FE electron source with high beam current capability; low pattern distortion and drift; high precision stage and pattern overlay; environmental SEM technologies; high speed electrostatic beam blanker; and gas injection systems for direct e-beam writing of nanostructures. The e-beam writing capability enables fabrication of structures applicable to multidisciplinary problems such as investigation of nanostructure based photonic or electronic biological sensors for molecular recognition, nano devices for more efficient energy conversion, and the spin physics of magnetic nanostructures. The SEM?s accessibility, ease of use, and consistency make the e-beam system ideal for integration into our educational and research programs benefitting undergraduate, graduate and post doctoral students. The core faculty involved in this project at Texas State, which anticipates achieving Hispanic Serving Institution status next year, will use the instrument to enhance outreach programs to assure the maximum opportunity for training and research by a diverse population of students. Layman Summary: The ability to both pattern and image at the nanoscale is indispensable for present-day materials science. The acquisition of an Ultra High Resolution Scanning Electron Microscope (SEM) capable of electron beam lithography provides this necessary capability for interdisciplinary research in the new Materials Science and Engineering Ph.D. program at Texas State University. This instrument eliminates barriers to research productivity presented by the existing antiquated SEM capable only for larger scale imaging, and provides the platform for interdisciplinary research linking innovation and discovery between the physical, engineering, and biological sciences enabling advances in nanoscale materials research for health, energy and security applications. The electron-beam writing capability enables fabrication of structures at the nanoscale (10-7m - 10-9 m) applicable to multidisciplinary problems such as investigation of nanostructure based biological sensors for molecular recognition, nano devices for more efficient energy conversion, and the spin physics of magnetic nanostructures. The SEM?s accessibility, ease of use, and consistency make the electron-beam system ideal for integration into our educational programs benefitting undergraduate, graduate and post doctoral students. The core faculty involved in this project at Texas State, which anticipates achieving Hispanic Serving Institution status next year, will use the instrument to enhance outreach programs to assure the maximum opportunity for training and research by a diverse population of students.