SBIR Phase I: Three-axis Vector Magnetometer with Novel Z-axis Sensor

这个小型企业创新研究（SBIR）第一阶段项目将证明将新型纳米结构钴过渡金属（Co/TM，TM= Ni，Pd，Pt，Au）多层膜与磁性隧道结（MTJ）相结合的可行性，以生产z轴磁场传感器，并应用于3轴矢量磁力计。 纳米结构的Co/TM多层膜是独特的，因为它们的磁化方向可以定制为垂直于膜平面。 因此，可以建立对沿沿着膜法线方向施加的磁场的增加的灵敏度。 这些材料具有易于调节的生长参数，使其成为一系列应用的理想选择，然而大部分研究都集中在具有大量磁滞的磁性介质上。 这里新颖的Co/TM基MTJ？S将被开发和生产，其中通过定制垂直各向异性以及传感器几何形状来使滞后最小化，以便展示可行的z轴场传感器。 预期的结果是，传感器的灵敏度与传统的？在飞机上？磁阻传感器将被证明，并提出与这项技术？该项目的更广泛的影响/商业潜力将是显著的，因为从导航、生物医学、安全到消费电子的许多领域将受益于所提出的z轴传感器和由此产生的单芯片3轴磁力计。 目前的技术通常使用多芯片或线圈配置，大大增加了设备的占地面积。 否则，使用灵敏度较低的霍尔传感器。 这里提出的新颖的z轴传感器将允许将更灵敏的z轴传感器放置在与平面内传感器相同的封装中，并且极大地减少了占用面积并提高了性能。 这在便携式生物医学、安全和消费电子应用中尤为重要，这些应用不断寻求在减少设备尺寸的同时增加功能。 与传统AMR传感器相比，这种设备配置还将降低所需的功率，从而更有效地利用便携式设备的电池寿命。 该应用所需的软磁Co/TM多层膜的开发也可以具有超出矢量磁力测量的应用，因为所需的特性也被寻求用于诸如发电和电流可调谐振荡器的应用。 该项目的技术将具有很高的商业化潜力，所获得的科学知识适用于其他希望利用纳米结构磁性材料的领域。

This Small Business Innovation Research (SBIR) Phase I project will demonstrate the feasibility of combining novel nanostructured cobalt-transition metal (Co/TM, TM= Ni, Pd, Pt, Au) multilayer films with magnetic tunnel junctions (MTJs) to produce a z-axis magnetic field sensor with application to a 3-axis vector magnetometer. Nanostructured Co/TM multilayers are unique in that their magnetization direction can be tailored to be normal to the film plane. Thus an increased sensitivity to magnetic fields applied along the film normal direction can be established. These materials have readily tunable growth parameters making them ideal for a range of applications, however much of the research has focused on magnetic media with large amount of magnetic hysteresis. Here novel Co/TM-based MTJ?s will be developed and produced with the hysteresis minimized by tailoring the perpendicular anisotropy as well as sensor geometry in order to demonstrate a viable z-axis field sensor. The expected result is that sensors with sensitivity comparable to conventional ?in-plane? magnetoresistive sensors will be demonstrated and presented in connection with this technology?s incorporation into a 3-axis vector magnetometer.The broader impact/commercial potential of this project would be significant in that many areas from navigation, biomedical, security to consumer electronics would benefit from the proposed z-axis sensor and resulting single-chip 3-axis magnetometer. Current technology typically uses multi-chip or coil configurations, greatly increasing the device footprint. Otherwise, less sensitive Hall sensors are used. The novel z-axis sensor proposed here would allow for placement of a more sensitive z-axis sensor in the same package as the in-plane sensors and greatly reduce the footprint and improve performance. This is particularly critical in portable biomedical, security and consumer electronics applications that continually look to increase functionality while reducing device size. This device configuration would also reduce the required power compared to conventional AMR sensors, making a more efficient use of battery life for portable devices. The development of the magnetically soft Co/TM multilayer films required for this application could also have applications beyond vector magnetometry as the required properties are also sought after for applications such as power generation and current tunable oscillators. The technology from this project will have high commercialization potential with the obtained scientific knowledge being applicable to other areas that look to utilize nanostructured magnetic materials.