MRI: Acquisition of ICP-RIE Capability at Texas State University - San Marcos

德克萨斯州立大学圣马科斯分校正在积极开发一个新的材料科学、工程和商业化(MSEC)项目，该项目建立在生物、化学/生物化学、工程技术、物理和英格拉姆工程学院之间的合作基础上。此次MRI收购感应耦合等离子体-反应离子刻蚀系统的目的是通过提供必要的性能和工艺一致性来增强大学现有的能力，以满足大学的目标？S强调跨学科研究是MSEC计划的核心。智能的优点是显著受益于正在进行的研究项目，包括微电子设备、微执行器和纳米/生物医学应用的开发。因此，新的服务设施预计将成为加强当前跨学科研究伙伴关系的催化剂。此外，正在获得的多功能系统为大学研究界以及工业和政府合作者提供了广泛的能力。将通过发展用户-大学-国家管理共享资源的伙伴关系，支持该系统，并保持其在研究和教育方面的有效性。该计划的广泛影响是作为德克萨斯州立大学的主要共享资源？S在MSEC发展公共和私营部门的活动。此外，学校会将该系统的使用整合到学生中吗？当然，顶石和研究经验。总而言之，该系统对于当前材料科学和工程研究的进步和发展至关重要，该研究将德克萨斯州的学术、联邦政府和工业实验室联系在一起，解决安全、卫生、能源和环境部门中社会关注的领域。

Texas State University-San Marcos is aggressively developing a new Materials Science, Engineering, and Commercialization (MSEC) Program based on collaboration amongst the Departments of Biology, Chemistry/Biochemistry, Engineering Technology, Physics, and the Ingram School of Engineering. The objective of this MRI acquisition of an inductively coupled plasma-reactive ion etching system is to enhance the present capability of the university by providing performance and process consistency necessary to meet the goals of the university?s strong emphasis on interdisciplinary research central to the MSEC program. The intellectual merit is in significantly benefitting ongoing research programs including the development of microelectronic devices, micro-actuators, and nano/biomedical applications. Hence, the new service facility is expected to be a catalyst that strengthens current interdisciplinary research partnerships. Furthermore, the multifunctional system being acquired offers a broad capability to the university research community and industrial and government collaborators. The system will be supported, and its effectiveness for research and education sustained, through the development of a user-university-state partnership for stewardship of shared resources. The broad impact of this program is to serve as a primary shared resource for Texas State University?s growing public and private sector activity in MSEC. In addition, the university will integrate the use of the system into the students? course, capstone, and research experiences. In summary, the system is essential to the advancement and growth of current research in materials science and engineering linking academic, federal government, and industry labs at Texas State addressing areas of societal concern in the security, health, energy and environmental sectors.