SBIR Phase I: Design and Cost Effective Manufacturing of Miniature Gas Chromatograph Sensors

这个小企业创新研究（SBIR）第一阶段项目涉及金属基微型气相色谱仪（mGC）传感器结构的设计和高通量和低成本制造。拟议的mGC传感器设计和制造是独一无二的，与目前市场上的“微型GC”设备/系统相比，具有竞争优势。微型气相色谱传感器被设想成为未来气相色谱仪器的基石，其中每个mGC模块可以执行单独的分析功能。含有多种mGCs的分析仪器可以定制，以提供具有广泛不同化学特性的化合物的分析。这种仪器可能成为“利基分析仪”，用于现场分析，而目前的能力是不可能的。设计和高效制造高可靠性、低成本、金属基mGC传感器对于建立此类设备的技术和商业可行性至关重要。项目团队在气相色谱设计、测试和应用以及基于金属的高纵横比微尺度结构（HARMS）的微加工方面拥有丰富的专业知识。通过模塑复制制造金属harm，结合高效的微尺度键合，保证了低成本、高通量、高可靠性的mGC器件生产。与硅基集成电路处理技术相比，所提出的方法具有竞争优势，并且代表了将金属基mGC传感器推向商业可行产品的良好机会。这个项目的广泛影响/商业潜力是多方面的，意义重大。微型气相色谱传感器模块可以在整个工业和社会中提高效率和改进。例如，更好的监控可以提高化学产品的质量。多点成分信息的现场监测和处理提高了化工厂的效率和对过程故障的控制。早期发现泄漏的排放物可以防止污染，并帮助工业满足清洁空气的要求。有效的监测可确保水质，减轻公众对健康的担忧。mGC传感器的可用性将消除许多与实验室分析相关的现场采样活动。实时监控降低了环境法规和罚款的合规成本，并加快了许可流程。加强机场和公共设施的安全可以减少公众的忧虑，减少延误。更早、更便宜地发现疾病可以改善卫生保健。因此，所提议的技术存在着巨大的市场兴趣。提出的mGC传感器可以实现许多新的尚未实现的应用。这是mGC传感器模块市场扩展潜力最大的地方。通过关注这些市场拓展机会，目前提出的项目将技术创新与商业承诺结合起来。

This Small Business Innovation Research (SBIR) Phase I project concerns the design and high-throughput and low-cost manufacturing of metal-based miniature gas chromatograph (mGC) sensor structures. The proposed mGC sensor design and manufacturing is unique and offers competitive advantages as compared to current "micro GC" devices/systems on the market. Miniaturized GC Sensors are envisioned to become the building blocks for future GC instruments, in which each mGC module can perform a separate analytical function. Analytical instruments containing multiple mGCs can be tailored to provide analyses of compounds with widely different chemical characteristics. Such instruments may become "niche analyzers" for field analytical use not possible with current capabilities. Design and efficient fabrication of high-reliability, low-cost, metal-based, mGC sensors are critical for establishing the technical and commercial feasibility of such devices. The project team combines extensive expertise on GC design, testing, and applications as well as microfabrication of metal-based high-aspect-ratio microscale structures (HARMS). Fabrication of metallic HARMS by molding replication, combined with efficient microscale bonding, promises low-cost, high-throughput, mGC device production with high reliability. The proposed methodology offers competitive advantages compared to silicon-based integrated-circuit processing techniques and represents a good opportunity for pushing metal-based mGC sensors to commercially-viable products.The broader impact/commercial potential of this project is multifaceted and significant. Miniature GC sensor modules can be a device that promotes efficiency and improvements throughout industry and society. For example, better monitoring improves the quality of chemical products. On-site monitoring and processing of multi-point compositional information improves chemical plant efficiencies and the control of process upsets. Early detection of emissions from leaks prevents pollution, and helps industry meet clean air compliance requirements. Effective monitoring assures water quality and alleviates public health concerns. The availability of mGC sensors will eliminate many field sampling activities connected to laboratory analysis. Real-time monitoring lowers compliance cost of environmental regulations and fines, and accelerates the permit process. Increased security at airports and public facilities lessens public apprehension and reduce time delays. Detection of disease earlier and more cheaply improves health care. As such, significant market interest exists for the proposed technology. The proposed mGC sensors may enable many new and yet unrealized applications. This is where the mGC sensor modules will have it greatest potential for market expansion. By focusing on such market expansion opportunities, the presently proposed project combines technical innovation with commercial promise.