Vacuum gauge available from high vacuum to beyond atmospheric pressure based on leakage of surface acoustic wave propagating on ball to surrounding gases.

利用球形声表面波（SAW）的超长自然准直传播测量了泄漏衰减的压力依赖性，并尝试实现超大气压真空计。该球形声表面波器件采用可抑制散射的Al薄膜换能器，在N2中以100 kPa的信噪比（S/N）为20传播1 m后，成功地测量了波形。此外，通过将振幅衰减曲线拟合到指数函数上，成功地精确测量了衰减。泄漏衰减是通过减去与压力无关的外来衰减来测量的。结果表明，在300 kPa到0.03 kPa的压力范围内，压力依赖性是线性的。在此基础上，建立了基于球SAW装置泄漏衰减测量的大气压外压力表的基础。

The pressure dependence of the leaky attenuation was measured using ultra-long propagation of naturally collimated surface acoustic wave (SAW) in a ball SAW device and the realization of the vacuum gauge available from beyond atmospheric pressure was attempted. The ball SAW device with an interditgital transducer of Al film, useful for suppressing the scattering, succeeded in measuring the waveform after propagating 1 m by S/N of 20 at 100 kPa in N2. Moreover, precise measurement of the attenuation was succeeded by fitting an amplitude decay curve to an exponential function. The leaky attenuation is measured by subtracting extraneous attenuation independent of the pressure. As a result, it was observed that the pressure dependence was linear in the pressure range from 300 kPa down to 0.03 kPa. From these results, the foundation of the pressure gauge available beyond atmospheric pressure was established based on the measurement of the leaky attenuation by the ball SAW device.