Controlling the electrical properties of ZnO films by forming zinc and oxide bridges by a plasma and electron-assisted process

提出了一种无需任何加热过程即可制备电稳定的氧化锌薄膜的新方法，即利用等离子体和电子束促进镀膜氧化锌薄膜上金属组分与氧之间的结合。等离子体气氛和电子束都可以作为非平衡成键能量的来源，在锌络合物中的锌和氧化锌颗粒中的氧之间建立桥梁，以构建氧化锌薄膜。我们的结果证实了通过控制用于辐照氧化锌涂层的电子的加速电压来获得低的导电特性是可能的。所制备的电稳定薄膜具有各种潜在的应用，特别适合于塑料介质上的电子器件。

A new method to produce electrically steady ZnO films without any heating process has been developed by using plasma and electron beams to facilitate bonding between the metallic component and the oxygen on coated ZnO films. Both plasma atmosphere and electron beams can function as sources of nonequilibrium bonding energy, forming bridges between the zinc present in the zinc complex and the oxygen in the ZnO particles to construct a zinc-oxide thin film. Our results confirm that it is possible to achieve low conductive characteristics by controlling the acceleration voltage of electrons used to irradiate the ZnO coating. The electrically steady films fabricated have various potential applications, being particularly well-suited to electrical devices on a plastic medium.